卫星激光通信MEMS快速反射镜可靠性研究进展  

Research progress of reliability of MEMS fast steering mirror for satellite laser communication

作　　者：朱伟鸿 汪洋[2,4] 王栎皓 刘艺晨 武震宇 Zhu Weihong;Wang Yang;Wang Lihao;Liu Yichen;Wu Zhenyu(School of Microelectronics,Shanghai University,Shanghai 200444,China;State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;Shanghai Industrial Technology Research Institute,Shanghai 201800,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]上海大学微电子学院,上海200444 [2]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050 [3]上海微技术工业研究院,上海201800 [4]中国科学院大学,北京100049

出　　处：《红外与激光工程》2023年第9期222-234,共13页Infrared and Laser Engineering

基　　金：中国科学院科学科研仪器装备研制项目(YJKYYQ20190026);上海市产业协同创新项目(HCXBCY-2021-044)。

摘　　要：快速反射镜(Fast Steering Mirror,FSM)具有响应快、精度高、分辨率高等优势,被广泛应用于卫星激光通信、超分辨率成像、高精度激光瞄准等领域,是捕获、跟踪和瞄准(Acquisition Tracking and Pointing,ATP)系统中的核心部件。传统快反镜主要由压电陶瓷和音圈电机驱动,而基于微机电(Micro Electro Mechanical System,MEMS)技术制备的快反镜具有小型化及批量化等优势,是技术发展的趋势,但其应用于卫星激光通信领域的可靠性尚未进行全面论证。文中介绍了快反镜的工作原理、环境适应性要求以及国内外快反镜的可靠性水平,结合致动原理和结构分析了现有快反镜的失效机理、评估方法和可靠性加固技术,最后指出了高可靠性快反镜的结构和加固技术发展方向,并通过综合分析与仿真验证了MEMS快反镜应用于卫星激光通信的可行性。Significance Fast steering mirror(FSM)is widely utilized in satellite laser communication,super-resolution imaging,high-precision laser aiming and other fields for its quick response,high precision and high resolution.The acquisition tracking and pointing(ATP)system relies heavily on FSM.The main challenge of satellite laser communication is the extremely precise beam stabilization and pointing for maintaining laser communication between moving satellites.In order to overcome this problem,satellite laser communication terminals must rely on the tilt mirror device called FSM to guide and stabilize these laser beams.Traditional FSM is primarily driven by piezoelectric ceramics and voice coil motors.However,thanks to the disadvantages of size and weight of traditional FSM,FSM based on micro electro mechanical system(MEMS)technology is becoming the perfect solution.There are three types of MEMS FSM with electrostatic,electromagnetic and piezoelectric driver.Besides fulfilling the deflection and speed requirements for steering the communication beams,FSM on satellite must also fulfill rigorous space qualification requirements.It is worth mentioning that the reliability of MEMS FSM as novel device applied to satellite laser communications urgently needs further research,but there is less comprehensive research work on this topic.Progress There is no universal rule for what it means to be"space qualified",so the reliability environmental tests and standards need specify individually space qualification tests and protocols for FSM used in satellite laser communication.It includes vibration and shock test,vacuum test,radiation tolerance and thermal test.These tests address the main environmental stresses on systems during launching and operation in space.Fine aiming and advance targeting are the main roles of FSM in space laser communication terminals.Therefore,FSM not only needs to pass the above environmental tests,but also should pay attention to the changes in the optical characteristics before and after the test,such

关 键 词：卫星激光通信 快速反射镜 微机电系统技术 环境适应性 可靠性 

分 类 号：TH209[机械工程—机械制造及自动化]