基于Si_(3)N_(4)和LRSPP的温度不敏感波导  

Temperature-insensitive waveguide based on Si_(3)N_(4) and LRSPP

作　　者：薛小枚 秦妍妍 李悦[2,3] 张彤 Xue Xiaomei;Qin Yanyan;Li Yue;Zhang Tong(Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology,Ministry of Education,School of Instrument Science and Engineering,Southeast University,Nanjing 210096,China;Suzhou Key Laboratory of Metal Nano-Optoelectronic Technology,Southeast University,Suzhou Campus,Suzhou 215123,China;Joint International Research Laboratory of Information Display and Visualization,School of Electronic Science and Engineering,Southeast University,Nanjing 210096,China)

机构地区：[1]东南大学仪器科学与工程学院微惯性仪表与先进导航教育部重点实验室,江苏南京210096 [2]东南大学苏州校区苏州市金属纳米光电技术重点实验室,江苏苏州215123 [3]东南大学电子科学与工程学院信息显示与可视化国际合作联合实验室,江苏南京210096

出　　处：《红外与激光工程》2023年第9期253-261,共9页Infrared and Laser Engineering

基　　金：国家自然科学基金项目(62275047);中国博士后科学基金项目(2022M710672);江苏省自然科学基金项目(BK20220816)。

摘　　要：光子集成芯片将多种功能器件进行片上集成,具有损耗低、带宽大、抗电磁干扰等优势,是当前光电领域发展的主流方向。集成光学器件的温度稳定性是影响其光学性能的重要因素之一。为了提高集成光学器件温度稳定性,提出了基于氮化硅(Si_(3)N_(4))和长程表面等离激元(Long-Range Surface Plasmon Polariton,LRSPP)波导的温度不敏感结构,对器件性能随温度的漂移进行抑制和补偿。首先,分析了Si_(3)N_(4)波导和LRSPP波导对接的模式耦合效率,当满足最佳匹配条件时,可实现耦合效率99.9%以上的高效耦合。对混合波导的温度特性进行了分析,结果表明,当LRSPP波导和Si_(3)N_(4)波导的最佳长度比为0.077,相位不随温度的变化而发生漂移,实现了温度不敏感的波导。当波导不能满足最佳长度比时,对LRSPP波导芯层施加电压实现主动补偿,亦可实现温度不敏感。此外,对LRSPP波导的传输特性进行了测试,测得偏振消光比为64 dB,具有良好的单偏振特性。文中提出的温度不敏感结构具有可主动调谐、损耗低、单偏振、普适性高等优点,能有效地解决Si_(3)N_(4)波导性能随温度变化发生漂移的问题,在Si_(3)N_(4)基光子集成芯片中具有广泛的应用前景。Objective Photonic integrated circuits composed of a variety of integrated functional devices on one chip have become the mainstream of the photoelectric fields due to their low loss,large bandwidth,and anti-electromagnetic interference properties,which are widely applied in optical sensing,radar,photon computing and medical testing.Due to the inherent thermo-optic characteristics of optical waveguide materials,the refractive index of the core and cladding materials will change with the temperature fluctuation,leading to the temperature stability which is one of the main problems in the engineering application of the photonic integrated circuits.Therefore,it is necessary to suppress and compensate for the drift of optical device performance with temperature to improve the temperature stability of the photonic integrated circuits.In this respect,a temperature-insensitive hybrid structure based on silicon nitride and long-range surface plasmon polariton(LRSPP)waveguides was proposed to suppress and compensate for the performance drift caused by temperature variation.Methods For the studies of the proposed temperature insensitive hybrid waveguide based on silicon nitride and LRSPP,the propagation properties,temperature stability and polarization characteristics were investigated.Firstly,considering the coupling efficiency between silicon nitride waveguide and LRSPP waveguide,the propagation model of silicon nitride waveguide and SPP waveguide was established.The mode coupling efficiencies and the optical propagation filed under different waveguide sizes were analyzed by using the finite difference time domain method.Then,the temperature stability was analyzed by the calculation of the phase change when the temperature fluctuated.Moreover,the polarization properties of the fabricated LRSPP waveguide were measured by the output spot and optical power under the transverse magnetic(TM)and the transverse electric(TE)mode.Results and Discussions The mode coupling efficiencies between the silicon nitride waveguide and LRSP

关 键 词：光子集成芯片 温度不敏感 相位调谐 氮化硅 表面等离激元 

分 类 号：TN256[电子电信—物理电子学]