X光弯晶成像金属薄膜面密度测量技术  

Areal density measurement technology for metal foils based on X-ray bent crystal imaging

作　　者：司昊轩 许昊[1,2,3,4] 杜慧瑶 伊圣振 王占山[1,2,3,4] Si Haoxuan;Xu Hao;Du Huiyao;Yi Shengzhen;Wang Zhanshan(Institute of Precision Optical Engineering Technology,School of Physical Science and Engineering,Tongji University,Shanghai 200092,China;Key Laboratory of Advanced Microstructured Materials,Tongji University,Shanghai 200092,China;Shanghai Digital Optics Frontier Science Research Base,Shanghai 200092,China;Shanghai Full-Spectrum High-Performance Optical Thin Film Devices and Application Professional Technical Service Platform,Shanghai 200092,China)

机构地区：[1]同济大学物理科学与工程学院,精密光学工程技术研究所,上海200092 [2]同济大学先进微结构材料教育部重点实验室,上海200092 [3]上海市数字光学前沿科学研究基地,上海200092 [4]上海市全光谱高性能光学薄膜器件与应用专业技术服务平台,上海200092

出　　处：《强激光与粒子束》2023年第11期43-49,共7页High Power Laser and Particle Beams

基　　金：国家自然科学基金项目(11875202);国家重点研发计划项目(2019YFE03080200)。

摘　　要：针对靶用高Z金属薄膜的无损检测需求,提出了一种通过超环面弯晶聚焦型X光单能成像器件,实现金属薄膜均匀性及面密度等参数精确标定的测量技术。该技术即通过高通量、高单能性成像,定量获取薄膜X光透过率及其空间分布,有效提升了面密度测量的精度,同时实现了对其均匀性的高空间分辨评估。从总体方案设计、元器件制备和测试实验等方面开展了深入研究,并评估了各种可能因素对测量不确定度的影响。所发展的超环面弯晶成像系统针对20 keV级的高能X射线在mm尺度内实现了优于5μm的微区分辨,能谱分辨达到几eV。通过泡沫金样品面密度测量实验证明了技术可行性,相对不确定度优于2%。研究结果为激光惯性约束聚变高Z靶材料的精密无损检测提供了一种新的测量技术,并有望应用于其他需要大视场、高空谱分辨成像的需求领域。In view of the measurement requirements of uniformity and areal density parameters of target metal foils,a non-destructive testing technology for high-Z metal foils by obtaining thin film X-ray transmittance and its spatial distribution through a toroidal crystal focusing type X-ray monochromatic imaging device is proposed.This technology not only effectively improves the accuracy of areal density measurement by high-throughput and highmonochromatic imaging,but also realizes high spatial resolution evaluation of thin film uniformity.This paper carries out in-depth research from the aspects of overall scheme design,component preparation and test experiment,and evaluates the influence of various possible factors on measurement uncertainty.The developed toroidal crystal imaging system achieves micro-region resolution better than 5μm within millimeter scale for 20 keV-level high-energy X-rays,and spectral resolution reaches several eV.The feasibility of the developed technology is verified by surface density measurement experiment of foam gold sample,and relative uncertainty of areal density measurement better than 2%is obtained.This paper provides a new measurement technology for precise non-destructive testing of high-Z target materials for laser inertial confinement fusion,which is also expected to be applied to other fields that require large field of view and high spatial spectral resolution imaging.

关 键 词：金属薄膜 X射线成像 超环面弯晶 高谱分辨 面密度测量 

分 类 号：O434.1[机械工程—光学工程]