基于165Y-75Y LiNbO_(3)的声表面波器件的声光互作用性能分析  

Analysis of Acousto-Optic Interaction for Surface Acoustic Wave Devices Based on 165Y-75Y LiNbO_3

作　　者：郭谦 李楠[1] 王石语[1] 路远 GUO Qian;LI Nan;WANG Shiyu;LU Yuan(School of Optoelectronic Engineering,Xidian University,Xi’an 710071,China;Infrared and Low Temperature Plasma Key Laboratory of Anhui Province,College of Electronic Engineering,National University of Defense Technology,Hefei 230037,China)

机构地区：[1]西安电子科技大学光电工程学院,陕西西安710071 [2]国防科技大学电子对抗学院红外与低温等离子体安徽省重点实验室,安徽合肥230037

出　　处：《压电与声光》2023年第5期657-662,共6页Piezoelectrics & Acoustooptics

基　　金：基础研究基金项目(2021110B179)。

摘　　要：该文从理论上仿真了切割方向为165°Y,传播方向为75°Y的LiNbO_(3)晶体(简称165Y LN)的表面波声光调制器的场分布及其重叠积分、驱动功率随波导厚度变化的关系,并与其他切割方向的仿真结果进行了比较。该方向位于材料退耦面内,且在该面具有最大的机电耦合系数,是潜在的高性能切割方向。测试表明,165Y LN的TE模和TM模在低频区均有较低的驱动功率和较大的重叠积分带宽,可被用于制作具有高性能且对偏振不敏感的表面波声光器件。The field distribution,overlap integral and the relationship between driving power and waveguide thickness variation of surface acoustic wave(SAW) acousto-optic modulator based on 165°Y-cut 75°Y-propagation LiNbO_3(165Y LN) has been simulated theoretically in this paper,and compared with the simulation results in other cut direction.This cut direction is located within the material decoupling surface and has the highest electromechanical coupling factor coefficient,making it a potential high performance cutting direction.The test results show that both TE and TM modes of 165Y-LN have lower driving power and larger overlap integral bandwidth at low frequency range,which makes 165°Y-75°Y LN suitable for fabrication high performance and polarization-insensitive SAW acoustic-optic devices.

关 键 词：声表面波器件 声光相互作用 重叠积分 LiNbO_(3) 驱动功率 

分 类 号：TN65[电子电信—电路与系统] O735[理学—晶体学]