压电微纳定位平台自适应陷波滤波在线谐振抑制  

Adaptive Notch Filtering Online Resonance Suppression of Piezoelectric Micro/Nano Positioning Platform

作　　者：王雯雯 赖磊捷 WANG Wenwen;LAI Leijie(School of Mechanical and Automotive Engineering,Shanghai University of Engineering Science,Shanghai 201620,China)

机构地区：[1]上海工程技术大学机械与汽车工程学院,上海201620

出　　处：《压电与声光》2023年第5期710-714,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金项目(51605275)。

摘　　要：压电驱动柔性微纳米定位平台通常呈现低阻尼谐振模态,高速运动时易激发机械谐振,从而严重影响控制系统稳定性、控制带宽和轨迹跟踪精度。为消除当前谐振控制器对平台动力学建模精度的依赖性,该文设计了一种自适应陷波滤波器来实现压电微纳定位平台的在线实时抑制谐振。首先,搭建了压电驱动柔性微纳定位平台系统并建立其机电耦合动力学模型;其次,利用快速傅里叶变换方法在线分析了闭环系统误差信号,设计平台频率特性提取算法,实现了对陷波滤波器参数的在线自适应整定;最后,利用所设计的自适应陷波滤波器对阶跃信号和三角波信号进行轨迹跟踪实验。实验结果表明,自适应陷波滤波器可以很好地实现谐振的在线抑制,能够有效提升平台的稳定性和轨迹跟踪精度。The piezoelectric drive flexible micro/nano positioning platform usually presents a low-damping resonance mode,and it is easy to excite mechanical resonance during high-speed motion,which seriously affects the stability of the control system,control bandwidth and trajectory tracking accuracy.In order to eliminate the dependence of the current resonant controller on the platform dynamics modeling accuracy,an adaptive notch filter is designed to realize the online real-time resonance suppression of the piezoelectric micro/nano positioning platform.Firstly,a piezoelectric drive flexible micro/nano positioning platform system is built and its electromechanical coupling dynamic model is established.Secondly,the fast Fourier transform method is used to analyze the closed-loop system error signal online,and the platform frequency characteristic extraction algorithm is designed to realize the online adaptive tuning of notch filter parameters.Finally,the designed adaptive notch filter is used to carry out trajectory tracking experiments on step signal and triangle wave signal.The experimental results show that the adaptive notch filter can achieve online suppression of resonance,which can effectively improve the stability and trajectory tracking accuracy of the platform.

关 键 词：微纳米定位平台 压电陶瓷驱动器 在线谐振抑制 自适应陷波滤波器 柔性机构 

分 类 号：TN384[电子电信—物理电子学] TP29[自动化与计算机技术—检测技术与自动化装置]