石英谐振加速度计低温漂结构设计及温度补偿  

Low Temperature Drift Structure Design and Temperature Compensation of Quartz Resonant Accelerometer

作　　者：杨敏 陈福彬[2] 朱嘉林[2] 田文杰[1] YANG Min;CHEN Fubin;ZHU Jialin;TIAN Wenjie(Sensor Key Laboratory,Beijing Information Science and Technology University,Beijing 100101,China;School of Automation,Beijing Information Science and Technology University,Beijing 100101,China)

机构地区：[1]北京信息科技大学传感器重点实验室,北京100101 [2]北京信息科技大学自动化学院,北京100101

出　　处：《压电与声光》2023年第5期719-722,730,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金(61871043);北京市教委科技计划重点项目(KZ201911232023)。

摘　　要：温度影响加速度计的性能,误差来源主要由石英材料及封装工艺产生的热应力引起。针对加速度计温度漂移现象,该文介绍了集成式石英谐振加速度计低温漂结构设计和补偿方法。首先通过对称的差分结构消除一阶温度系数,并进行工艺优化,降低封装工艺对谐振器产生的热应力;其次采用随机森林拟合算法建立温度模型来补偿加速度计的温漂。在-20~80℃温度范围内对加速度计样机进行温漂测试,结果表明,工艺优化及补偿后的样机偏置稳定性提高了一个数量级。The temperature affects the performance of the accelerometer,and the main source of error is caused by the thermal stress generated by quartz materials and packaging processes.In response to the temperature drift phenomenonr,this article introduces the design and compensation method of the low-temperature drift structure of the integrated quartz resonant accelerometer.Firstly,the first-order temperature coefficient is eliminated by a symmetrical differential structure,and the process optimization is carried out to reduce the thermal stress generated by the packaging process on the resonator.Secondly,the random forest fitting algorithm is used to establish a temperature model to compensate for the temperature drift of the accelerometer.The temperature drift test of the accelerometer prototype is carried out within the temperature range of-20~80 ℃,and the results show that the bias stability of the prototype has been improved by an order of magnitude after process optimization and compensation.

关 键 词：谐振式加速度计 差频 温度补偿 低温漂 随机森林 

分 类 号：TH706[机械工程—仪器科学与技术] TN384[机械工程—精密仪器及机械] TN751.2[电子电信—物理电子学]