集成式石英微机械陀螺质量块制作工艺研究  

Study on Manufacturing Process of Masses of Integrated Quartz MEMS Gyroscope

作　　者：白顺风 李贵龙 张挺 谢佳维[1,2,3] 董宏奎 王枥[1,2,3] 胡爽 曾庆海 李睿杰 简小娟 Shunfeng;LI Guilong;ZHANG Ting;XIE Jiawei;DONG Hongkui;WANG Li;HU Shuang;ZENG Qinghai;LI Ruijie;JIAN Xiaojuan(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China;Solid Inertial Technology Enterprise Engineering Technology Research Center of Chongqing City,Chongqing 401332,China;Solid Inertial Technology Engineering Laboratory of Chongqing City,Chongqing 401332,China;School of Smart Health,Chongqing College of Electronic Engineering,Chongqing 401331,China)

机构地区：[1]中国电子科技集团第二十六研究所,重庆400060 [2]重庆市固态惯性技术企业工程技术研究中心,重庆401332 [3]重庆市固态惯性技术工程实验室,重庆401332 [4]重庆电子工程职业学院智慧健康学院,重庆401331

出　　处：《压电与声光》2023年第5期731-735,共5页Piezoelectrics & Acoustooptics

基　　金：国家部委预研项目(50917010401)。

摘　　要：为了满足集成式陀螺芯片对高精度质量块的要求,该文采用电子束镀膜(EBPVD)工艺代替传统的电镀工艺,在石英微机械陀螺芯片音叉端部制作了厚约2μm的质量块,并对质量块厚度均匀性、对准精度一致性及膜层附着力进行了研究。首先,通过调整镀膜高度和角度以满足厚度精度要求;其次,为了保证对准精度,设计了掩膜夹具和位置调整夹具;最后,通过实验确定了最佳镀膜参数。此外,对制作的质量块进行了激光修调实验,经过修调后,陀螺机械耦合误差信号的幅值从初始的301.0 mV降至17.6 mV。In order to meet the requirements of the integrated gyroscope chip for high-precision masses,this paper adopts the electron beam physical vapor deposition(EBPVD) instead of traditional electroplating process to form the masses with a thickness of about 2 μm at the tips of tuning fork.The thickness uniformity,alignment accuracy and film adhesion of the masses are investigated.Firstly,by adjusting the height and angle of deposition,the thickness requirements are met.Secondly,in order to ensure the alignment accuracy,the metal mask jig and wafer adjustment jig are designed.Finally,the optimal deposition parameters are determined through experiments.In addition,the laser trimming experiment on the fabricated masses is carried out.After trimming,the amplitude of the mechanical coupling error of gyroscope is decreased from the initial value of 301.0 mV to 17.6 mV.

关 键 词：陀螺芯片 机械耦合误差 电子束镀膜 激光修调 

分 类 号：TN804[电子电信—信息与通信工程] TP212[自动化与计算机技术—检测技术与自动化装置]