含类金刚石薄膜的铝镁合金振膜的制备及其声学特性研究  

Preparation and Acoustic Characteristics of Magnalium Diaphragm with DLC Coating

作　　者：孙庆磊 方非凡 王文清 郝亮[1,2] Sun Qinglei;Fang Feifan;Wang Wenqing;Hao Liang(Gemmological Institute,China University of Geosciences,Wuhan 430074,China;Hubei Engineering Research Center of Jewelry,China University of Geosciences,Wuhan 430074,China;State Key Laboratory of Silicate Materials for Architectures,Wuhan University of Technology,Wuhan 430070,China)

机构地区：[1]中国地质大学珠宝学院,湖北武汉430074 [2]中国地质大学湖北省珠宝工程技术研究中心,湖北武汉430074 [3]武汉理工大学硅酸盐建筑材料国家重点实验室,湖北武汉430070

出　　处：《稀有金属材料与工程》2023年第10期3470-3478,共9页Rare Metal Materials and Engineering

基　　金：中国博士后科学基金(2022M722936);中央高校青年优秀人才培育项目(20211234#);湖北省教育厅科学研究计划指导性项目(B2022261);硅酸盐建筑材料国家重点实验室开放基金(SYSJJ2022-14);湖北省博士后创新研究岗位;湖北省珠宝工程技术研究中心开放基金(CIGTXM-03-202202)。

摘　　要：通过脉冲等离子体增强化学气相沉积技术在铝镁合金振膜上沉积类金刚石(diamond-like carbon,DLC)薄膜。利用SEM、AFM和RAMAN表征了不同沉积工艺下的DLC薄膜的形态和组成结构,测试了含DLC膜层的铝镁合金复合振膜的力学性能,相比铝镁合金基底振膜,DLC薄膜使得复合振膜在表面粗糙度、硬度和弹性模量方面有较多改善。含DLC薄膜的铝镁合金复合振膜的频率响应(SPL)曲线和谐波失真(THD)等声学性能表明,复合振膜提升了频响上限,赋予了扬声器高保真性。采用含DLC膜层的铝镁合金复合振膜制成的音响设备,具有良好的音色自然度、声场表现度、人声表现度和清晰度,能够有效提高人类主观听音效果。In this study,the diamond-like carbon(DLC)coating was deposited on magnalium diaphragm by pulsed plasma enhanced chemical vapor deposition technology.The morphology and composition of the DLC coating deposited under different parameters were characterized by SEM,RAMAN and AFM,and the mechanical properties of composite magnalium diaphragms with DLC coating were studied.Compared with substrate magnalium diaphragm,the DLC coatings improve the surface roughness,hardness and elasticity modulus.The frequency response(SPL)curves and total harmonic distortion(THD)curves show that the DLC coatings increase the upper limit of frequency response and impart high fidelity to the loudspeaker.Audio equipments fabricated with composite magnalium diaphragms with DLC coatings have good timbre naturalness,sound field expression,vocal performance and clarity,which can effectively improve the human subjective auditory effect.

关 键 词：类金刚石膜 铝镁合金 弹性模量 频响特性 谐波失真 

分 类 号：TB43[一般工业技术] TN643[电子电信—电路与系统]