二维线性模组空间运动误差实时测量  

Real-time spatial error measurement of two-dimensional linear module

作　　者：娄志峰[1] 张汉平 周竞杰 张记云 钱钧 范光照 LOU Zhifeng;ZHANG Hanping;ZHOU Jingjie;ZHANG Jiyun;QIAN Jun;FAN Guangchao(College of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China;Dalian Institute of Technology Gaoyou Research Institute Co.Ltd,Gaoyou 225600,China)

机构地区：[1]大连理工大学机械工程学院,辽宁大连116024 [2]大连理工高邮研究院有限公司,江苏高邮225600

出　　处：《光学精密工程》2023年第21期3111-3124,共14页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.52275521);中央高校基本科研业务费资助项目(No.DUT22YG209);江苏省政策引导类计划资助项目(No.BZ2020051)。

摘　　要：为实时检测二维线性模组的运动误差,搭建了误差实时测量系统。该系统由四自由度运动误差测量模块、滚动角误差测量模块和线性光栅尺组成,实现单轴六自由度运动误差测量。基于齐次坐标转换矩阵(Homogeneous Transfor-mation Matrix,HTM)原理构建二维模组的空间误差模型,对功能点的实际空间位置进行表示;完成测量系统标定实验,并基于阿贝-布莱恩原则处理实验数据完成比对实验。最终,测量系统的定位误差、直线度误差和角度误差测量精度分别达到±1.2μm,±1.3μm和±1′′,并根据空间误差模型分析二维线性模组XZ平面对角线位置的测量误差。结果表明,使用二维线性模组空间误差模型求解后,XZ平面对角线位置的测量误差由68μm降至13μm,证明采用该系统进行线性模组误差测量是有效的;此外,因为加载状态下二维线性模组各位置的运动误差会改变,为验证测量系统能够实时测量出线性模组的空间误差变化,在Z轴滑块上加装质量为2 kg的标准砝码进行对照实验。结果显示,在使用二维线性模组空间误差模型求解后,XZ平面对角线位置的测量误差由56μm降至14μm。A real-time error measurement system was developed to measure the motion error of a two-di-mensional linear module.The system consisted of a four-degree-of-freedom motion error measurement module(for measuring the horizontal straightness,vertical straightness,pitch angle,and yaw angle er-rors),roll angle error measurement module(for measuring the roll angle error),and linear grating ruler(for measuring the axial positioning error);thus,it measured six degrees of freedom motion errors in a sin-gle axis.The principle of the homogeneous transformation matrix(HTM),was used to construct a spatial error model for the two-dimensional module to represent the actual spatial positions of functional points.The calibration experiments of the measurement system were performed,and the experimental data were processed based on the Abbe-Bryan principle to complete the comparison experiment.Finally,the posi-tioning,straightness,and measurement accuracies of angular errors reach±1.2μm,±1.3μm,and±1′′,respectively.The measurement error of the diagonal position in the XZ plane of the two-dimension-al linear module was analyzed based on the proposed spatial error model.The results indicate that the mea-surement error of the diagonal position in the XZ plane decreases from 68μm to 13μm after using the two-dimensional linear module spatial error model.In addition,because the motion errors of the two-dimen-sional linear module at different positions changes under loading,a comparative experiment was conducted by adding a standard weight of 2 kg to the Z-axis slider to verify the measurement system could capture re-al-time spatial error variations of the linear module.The results show that the measurement error of the di-agonal position in the XZ plane decreases from 56μm to 14μm after using the two-dimensional linear mod-ule spatial error model.

关 键 词：误差测量系统 二维线性模组 空间误差模型 实时测量 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]