高数值孔径宽谱段折反射式物镜设计  

Design of Catadioptric Objective Lens with Hyper Numerical Aperture and Wide Spectral Band

作　　者：王超 曲贺盟[1,2] 管海军 王哈[1] 张继真 谢晓麟 王宁 Wang Chao;Qu Hemeng;Guan Haijun;Wang Ha;Zhang Jizhen;Xie Xiaolin;Wang Ning(Changchun Changguang Smart Optics Technology Company,Changchun 130102,Jilin,China;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,Jilin,China)

机构地区：[1]长春长光智欧科技有限公司,吉林长春130102 [2]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《光学学报》2023年第19期257-263,共7页Acta Optica Sinica

基　　金：吉林省科技发展计划青年成长科技计划项目(20210508036RQ);吉林省科技发展计划重点研发项目(20210201090GX)。

摘　　要：针对基因测序、半导体检测、工业显微镜及生命医疗等领域对显微物镜日益增长的技术需求,成像谱段向着宽谱段深紫外(DUV)方向发展,目前非浸液式显微物镜存在数值孔径(NA)低、视场小、宽谱段内色差严重等问题。基于此,提出一款折反射式物镜。所提折反射式物镜具有宽谱段、高数值孔径、消色差等优点,根据折反射式结构的消色差光学特性,镜片只采用一种材料就可以校正色差。系统由12片镜片组成,数值孔径为0.91,成像谱段为深紫外到可见光(275~600 nm),最大视场为0.3 mm,系统全视场全谱段波像差小于0.033λ,消除了二级光谱,成像质量满足使用要求。Objective With the rapid development of high-tech fields such as gene sequencing,semiconductor chips,and life medicine,traditional microscopes are no longer able to meet the increasing technological needs.The microscopic objective lens,as the most core technical component in the microscopic system,is related to the imaging performance of the entire system and needs to meet conditions such as high numerical aperture,large field of view,and wide spectral range.When the imaging objective is located in the air,there is a theoretical limit to the numerical aperture of non-immersed structures.Therefore,non-immersed objective lenses with a high numerical aperture have become a technical challenge that Chinese surgical researchers urgently need to solve.The spectral range required in the field of gene sequencing is becoming shorter and shorter,moving towards ultraviolet and even deep ultraviolet.The wide spectral range causes an increasing color difference in the system,and ordinary application lenses do not need to correct the secondary spectrum.Microscopic objective lenses have extremely strict requirements for chromatic and spherical aberration and require correction.We focus on the technical requirements and current development trends of high-end microscopic objective lenses and design a catadioptric objective lens with a high numerical aperture and wide spectral band,with a numerical aperture of 0.91 and effective correction of color difference.Methods We have designed a microscopic objective lens that eliminates secondary spectra within a wide spectral range.Usually,in order to eliminate axial color differences,a combination of positive and negative focal lenses of different materials is required for correction.By taking two lenses as an example,there is a significant difference in Abbe numbers and a small difference in optical power between the two lens materials.In order to further correct the secondary spectrum,it is necessary to have similar dispersion coefficients and significant differences in Abbe numbers be

关 键 词：高数值孔径 深紫外 折反射物镜 消色差 

分 类 号：O435[机械工程—光学工程]