放电泵浦深紫外准分子激光关键技术与应用  

Discharge-Pumped Excimer Laser Technologies and Applications

作　　者：梁勖 沈启辉 邵景珍 林颖 Liang Xu;Shen Qihui;Shao Jingzhen;Lin Ying(Anhui Institute of Optics and Fine Mechanics,Hefei Institute of Physical Science,Chinese Academy of Sciences,Hefei 230031,Anhui,China;University of Science and Technology of China,Hefei 230026,Anhui,China)

机构地区：[1]中国科学院合肥物质科学研究院安徽光学精密机械研究所,安徽合肥230031 [2]中国科学技术大学,安徽合肥230026

出　　处：《激光与光电子学进展》2023年第19期52-65,共14页Laser & Optoelectronics Progress

基　　金：中国科学院科研仪器设备研制项目(YJKYYQ20210007);基础加强计划重点基础研究项目(2021-JCJQ-ZD-051-00-05);中国科学院青促会资助项目(2018481);国家自然科学基金(61307112);国家科技重大专项(2009ZX02206-004,2013ZX02202004)。

摘　　要：准分子激光是大功率输出的深紫外波段激光光源,在多方面具有独特的应用,然而国内的准分子激光行业在关键技术、高端产品等方面和国外仍有一定差距,存在着“卡脖子”的状况。首先介绍了准分子激光的基本特性、应用分类、国内外的发展情况等;其次着重介绍了放电泵浦准分子激光的基本结构和目前实用器件的多项关键技术,主要包括快脉冲激励源、气体放电腔、光学谐振腔等;最后,介绍了放电泵浦准分子激光在工业、医疗、科研等领域目前的主要应用和进展,分析了其中的一些独特的关键技术。Excimer laser is a kind of deep-ultraviolet laser source with high power output,which has unique applications in many aspects.However,there is still a gap between the domestic excimer laser industry and foreign countries in key technologies and high-end products,and there is a situation of stuck neck.First,this paper introduces the basic characteristics,application classification,briefly development and status of excimer laser.Second,the basic structure and some key technologies of practical devices of discharge-pumped excimer laser are introduced,including fast pulse excitation source,gas discharge cavity,optical resonator and so on.Finally,the main applications and progress of discharge-pumped excimer laser in industry,medical treatment,scientific research,and other fields are introduced,as well as some unique key technologies.

关 键 词：激光光学 准分子激光 放电泵浦 深紫外 

分 类 号：TN248.2[电子电信—物理电子学]