半球谐振陀螺质量不均匀性调平技术研究综述  

Survey of the Research on Mass Non-uniformity Leveling Technology of Hemispherical Resonator Gyroscope

作　　者：郑超 张林[1] 章光建 肖茵静 凌林本 李昊天 ZHENG Chao;ZHANG Lin;ZHANG Guang-jian;XIAO Yin-jing;LING Lin-ben;LI Hao-tian(Beijing Aerospace Times Laser Inertial Technology Company,Ltd.,Beijing 100094;Beijing Institute of Aerospace Control Devices,Beijing 100039)

机构地区：[1]北京航天时代激光导航技术有限责任公司,北京100094 [2]北京航天控制仪器研究所,北京100039

出　　处：《导航与控制》2023年第4期17-25,73,共10页Navigation and Control

摘　　要：半球谐振陀螺是具有精度高、质量小、寿命长等特点的新型固态陀螺,在航海、航空、航天等领域有着广泛应用前景。半球谐振陀螺的质量不均匀性调平技术是制造高精度半球谐振陀螺的关键技术。针对半球谐振陀螺质量不均匀性调平技术,首先对谐振子性能影响最大的四次谐波缺陷辨识方法及其关键性能指标发展现状进行了分析;其次,对影响谐振子性能的一次、二次、三次谐波缺陷辨识方法进行了归纳梳理;然后,总结分析了谐振子四类调平工艺——传统机械加工、化学刻蚀、激光刻蚀和离子束刻蚀的工艺方法及特点;最后,展望了谐振子调平技术待解决的问题及未来研究的重点。Hemispherical resonator gyroscope is a new type of solid-state gyroscope with high precision,small mass and long life.It has a wide application prospect in navigation,aviation,aerospace and other fields.The mass non-uniformity leveling technology of hemispherical resonator gyroscope is the key technology to manufacture high-precision hemispherical resonator gyroscope.For this technology,the fourth harmonic defect identification method and its key performance indicators development status,which have the greatest impact on the performance of the harmonic oscillator,are firstly analyzed.Secondly,the identification methods for primary,secondary,and tertiary harmonic defects that affect the performance of the harmonic oscillator are sorted out.Then,the four types of leveling processes for harmonic oscillators—methods and characteristics of traditional machining,chemical etching,laser etching and ion beam etching,are summarized and analyzed.Finally,the problems to be solved and the future research focus of the harmonic oscillator leveling technology are prospected.

关 键 词：半球谐振陀螺 频率裂解 谐波缺陷辨识 调平方法 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计]