基于PZT薄膜的高频压电式微机械超声换能器的仿真与制备  

Simulation and fabrication of high frequency piezoelectric micromachined ultrasonic transducer based on PZT film

作　　者：刘亚琦 陈明珠 张巧珍 赵祥永 王巨杉 唐艳学[1] 王飞飞[1] 王书豪 汪尧进 苗斌[4] 李加东[4] LIU Yaqi;CHEN Mingzhu;ZHANG Qiaozhen;ZHAO Xiangyong;WANG Jushan;TANG Yanxue;WANG Feifei;WANG Shuhao;WANG Yaojin;MIAO Bin;LI Jiadong(Mathematics and Science College,Shanghai Normal University,Shanghai 200234,China;College of Information,Mechanical and Electrical Engineering,Shanghai Normal University,Shanghai 201418,China;School of Materials Science and Engineering,Nanjing University of Science and Technology,Nanjing 210094,Jiangsu,China;Suzhou Institute of Nanotechnology and Nano-bionics,Chinese Academy of Sciences,Suzhou 215123,Jiangsu,China)

机构地区：[1]上海师范大学数理学院,上海200234 [2]上海师范大学信息与机电工程学院,上海201418 [3]南京理工大学材料科学与工程学院,江苏南京210094 [4]中国科学院苏州纳米技术与纳米仿生研究所,江苏苏州215123

出　　处：《上海师范大学学报（自然科学版）》2023年第5期597-608,共12页Journal of Shanghai Normal University(Natural Sciences)

基　　金：国家自然科学基金(52172005,11574214,11974250)。

摘　　要：压电式微机械超声换能器(PMUT)是当前生物医学超声成像领域的研究热点.锆钛酸铅(PbZrO_(3)-PbTiO_(3),PZT)压电薄膜是近年来微机械超声换能器使用的核心压电材料.基于PZT压电薄膜,使用有限元软件COMSOL Multiphysics创建了三维有限元仿真模型,并在(0,1)模态下研究了压电薄膜结构的几何参数,其谐振频率达到222.12 MHz,有效机电耦合系数(keff)为5.13%.采用光刻和刻蚀方法制备了PZT压电薄膜的PMUT单元原型器件.该器件的空腔结构完整,谐振频率在(0,1)模态下为25.87 MHz,仿真与测试结果相似,振动模态较纯,振动位移性能较好.研究结果表明:采用PZT压电薄膜的PMUT在高分辨率、高频医学超声成像中具有较好的应用前景.Piezoelectric micromachined ultrasonic transducer(PMUT)is hotspot in the study of biomedicine ultrasonic imaging.Lead zirconate titanate(PbZrO_(3)-PbTiO_(3),PZT)piezoelectric film is the key piezoelectric material used in micromechanical ultrasonic transducers.In this paper,a three-dimensional finite element simulation model was built by COMSOL Multiphysics based on PZT piezoelectric film,and the geometric structure parameters were studied under the modal of(0,1).Its resonant frequency is 22.12 MHz and the effective electromechanical coupling coefficient(k2 eff)is 5.13%.We studied the PMUT unit prototype device of PZT piezoelectric film,which was prepared by adopting photolithography and etching methods.The cavity structure of this device is complete.The resonant frequency under the modal of(0,1)is 25.87 MHz.The results of the simulation model are similar to the tested results.The vibration mode is pure,and the vibration displacement performance is good.It’s shown that the PMUT which adopts the PZT piezoelectric film has good application prospects in high resolution and high frequency medical ultrasound imaging.

关 键 词：压电式微机械超声换能器(PMUT) 高频 锆钛酸铅(PbZrO_(3)-PbTiO_(3) PZT)薄膜 器件制备 

分 类 号：O469[理学—凝聚态物理]