微型半导体制冷器在芯片散热的应用分析  

Application Analysis of Micro Semiconductor Refrigerator in Chip Heat Dissipation

作　　者：于跃东 左政 YU Yuedong;ZUO Zheng(China Center for Information Industry Development,Beijing 100048,China)

机构地区：[1]中国电子信息产业发展研究院,北京100048

出　　处：《集成电路应用》2023年第9期19-21,共3页Application of IC

摘　　要：阐述半导体制冷器的发展状况,包括锭材切割工艺、MEMS工艺和CMOS工艺制备微型半导体制冷器的特性和应用,并展望微型半导体制冷器未来发展趋势。This paper describes the development status of semiconductor refrigerators,including the characteristics and applications of micro semiconductor refrigerators prepared by ingot cutting process,MEMS process,and CMOS process,and looks forward to the future development trend of micro semiconductor refrigerators.

关 键 词：半导体制冷器 集成电路散热 微型热电器件 主动控温 

分 类 号：TN377[电子电信—物理电子学]