Micromachined Infrared Thermopile Detector Based on a Suspended Film Structure  

作　　者：Cheng LEI Yihao GUAN Ting LIANG Xuezhan WU Yuehang BAI Mingfeng GONG Pingang JIA Jijun XIONG 

机构地区：[1]The State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China [2]Integrated Circuit Business Group,China Resources Microelectronics Limited,Wuxi 21400,China

出　　处：《Photonic Sensors》2023年第3期50-62,共13页光子传感器（英文版）

基　　金：This work was supported in part by the National Natural Science Foundation of China(Grant No.51935011);Innovative Research Group Project of National Science Foundation of China(Grant No.51821003);Fund for Shanxi“1331 Project”Key Subject Construction,Key Research and Development Project of Shanxi Province(Grant Nos.202102030201001 and 202102030201009);Key Special Project of Science and Technology of Shanxi Province(Grant No.202201030201004).

摘　　要：The micro-electromechanical system(MEMS)infrared thermopile is the core working device of modern information detection systems such as spectrometers,gas sensors,and remote temperature sensors.We presented two different structures of MEMS infrared thermopiles based on suspended film structures.They both deposited silicon nitride over the entire surface as a passivated absorber layer in place of a separate absorber zone,and the thermocouple strip was oriented in the same direction as the temperature gradient.The same MEMS preparation process was used and finally two different structures of the thermopile were characterized separately for testing to verify the impact of our design on the detector.The test results show that the circular and double-ended symmetrical thermopile detectors have responsivities of 27.932 V/W and 23.205 V/W,specific detectivities of 12.1×10^(7) cm·Hz^(1/2)·W^(-1) and 10.1×10^(7) cm·Hz^(1/2)·W^(-1),and response time of 26.2 ms and 27.06 ms,respectively.In addition,rectangular double-ended symmetric thermopile has a larger field of view than a circular thermopile detector,but is not as mechanically stable as a circular thermopile.

关 键 词：Adiabatic groove circular arrangement double-ended symmetrical arrangement THERMOPILE temperature gradient 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]