THERMOPILE

作品数：7被引量：12H指数：1
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相关领域：自动化与计算机技术更多>>
相关期刊：《Chinese Journal of Electronics》《Photonic Sensors》《Microsystems & Nanoengineering》《Journal of Semiconductors》更多>>
相关基金：国家自然科学基金国家高技术研究发展计划更多>>
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High temperature heat flux sensor with ITO/In_(2)O_(3)thermopile for extreme environment sensing
《Microsystems & Nanoengineering》2024年第4期163-174,共12页Helei Dong Meimei Lu Weifeng Wang Qiulin Tan 
supported in part by the National Nature Science Foundation of China under Grant 52175525;in part by the National Key Research and Development Program of China under Grant 2020YFB2009100(104);in part by the Innovative Research Group Project of the National Natural Science Foundation of China under Grant 51821003;in part by the Fund for Shanxi‘1331 Project’Key Subject Construction.
Hypersonic vehicles and aircraft engine blades face complex and harsh environments such as high heat flow density and high temperature,and they are generally narrow curved spaces,making it impossible to actually insta...
关键词：FILM THICK EXTREME 
Micromachined Infrared Thermopile Detector Based on a Suspended Film Structure
《Photonic Sensors》2023年第3期50-62,共13页Cheng LEI Yihao GUAN Ting LIANG Xuezhan WU Yuehang BAI Mingfeng GONG Pingang JIA Jijun XIONG 
This work was supported in part by the National Natural Science Foundation of China(Grant No.51935011);Innovative Research Group Project of National Science Foundation of China(Grant No.51821003);Fund for Shanxi“1331 Project”Key Subject Construction,Key Research and Development Project of Shanxi Province(Grant Nos.202102030201001 and 202102030201009);Key Special Project of Science and Technology of Shanxi Province(Grant No.202201030201004).
The micro-electromechanical system(MEMS)infrared thermopile is the core working device of modern information detection systems such as spectrometers,gas sensors,and remote temperature sensors.We presented two differen...
关键词：Adiabatic groove circular arrangement double-ended symmetrical arrangement THERMOPILE temperature gradient 
Research on Measurement Accuracy of the Double-Channel Microwave Power Sensors Based on an MEMS Cantilever Beam
《Chinese Journal of Electronics》2019年第5期916-919,共4页WANG Debo WU Lele LI Longfei DAI Ruiping 
supported by the National Natural Science Foundation of China(No.61704086);the Province Natural Science Foundation of Jiangsu(No.BK20140890);the Open Research Fund of Key Laboratory of MEMS of Ministry of Education,Southeast University(No.3206005302);the Scientific Research Foundation of Nanjing University of Posts and Telecommunications(No.NY215139,No.NY217039)
A thermopile-based microwave power sensor and a double-channel microwave power sensor are compared in order to research the measurement accuracy of microwave power. The relationship of the displacement of MEMS cantile...
关键词：Thermopile-based power sensor MEMS CANTILEVER Double-channel Measurement ACCURACY 
Advanced Thermopile IR Dual Line Sensor for Smart Home
《Journal of Sensor Technology》2018年第4期69-87,共19页Christophe Escriba Julien Roux Georges Soto-Romero Pascal Acco David Bourrier Eric Campo Jean-Yves Fourniols 
This article presents all steps between the advanced design and the production of CMOS compatible thermoelectric effect infrared sensors dedicated to smart home applications. It will start by making a comparison betwe...
关键词：THERMOPILE Array THERMOELECTRIC Model Three-Dimensional MICRO-MACHINING Self-Regulated Special-Purpose Measurement BENCH 
MEMS-based thermoelectric infrared sensors： A review被引量：12
《Frontiers of Mechanical Engineering》2017年第4期557-566,共10页Dehui XU Yuelin WANG Bin XIONG Tie LI 
In the past decade, micro-electromechanical systems （MEMS）-based thermoelectric infrared （IR） sensors have received considerable attention because of the advances in micromachining technology. This paper presents ...
关键词：thermoelectric infrared sensor CMOS-MEMS THERMOPILE MICROMACHINING wafer-level package 
A 55-dB SNDR,2.2-m W double chopper-stabilized analog front-end for a thermopile sensor
《Journal of Semiconductors》2014年第5期80-85,共6页陈铖颖 胡晓宇 范军 黑勇 
supported by the Research on Information Technology of a New Generation of Strategic Leading Scientific and Technological Special System(No.XDA06020401)
A double chopper-stabilized analog front-end （DCS-AFE） circuit for a thermopile sensor is presented, which includes a closed-loop front-end amplifier and a 2nd-order 1 bit quantization sigma-delta modulator. The amp...
关键词：THERMOPILE chopper-stabilized amplifier MODULATOR 
Sensitivity of MEMS microwave power sensor with the length of thermopile based on Fourier equivalent model
《Journal of Semiconductors》2011年第7期52-56,共5页刘彤 廖小平 王德波 
Project supported by the National Natural Science Foundation of China(Nos.61076108,60976094,60676043);the National High Technology Research and Development Program of China(No.2007AA04Z328)
A Fourier equivalent model is introduced to research the thermal transfer behavior of a terminating-type MEMS microwave power sensor.The fabrication of this MEMS microwave power sensor is compatible with the GaAs MMIC...
关键词：MEMS THERMOPILE microwave power sensitivity 
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