云南高校图书馆联盟文献共享服务平台- CMOS-MEMS

CMOS-MEMS: 作品数：11被引量：22H指数：3; 导出分析报告; 相关领域：自动化与计算机技术电子电信更多>>; 相关作者：杨晋玲杨富华朱银芳崔建功杨玉华更多>>; 相关机构：东南大学中国科学院清华大学中国科学院大学更多>>; 相关期刊：《微纳电子技术》《Microsystems & Nanoengineering》《仪表技术与传感器》《Journal of Semiconductors》更多>>; 相关基金：国家自然科学基金上海市浦江人才计划项目更多>>

System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC: 《Microsystems & Nanoengineering》2025年第1期111-121,共11页Linze Hong Ke Xiao Xiangyu Song Liwei Lin Wei Xu; supported by the National Natural Science Foundation of China(62474115,52105582);Natural Science Foundation of Guangdong Province(2024A1515030026,2022A1515010894);Fundamental Research Foundation of Shenzhen(JCYJ20210324095210030,JCYJ20220818095810023,ZDSYS20220527171402005);the State Key Laboratory of Radio Frequency Heterogeneous Integration(Independent Scientific Research Program No.2024013)for Linze Hong,Ke Xiao,Xiangyu Song,and Wei Xu.; We present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC.The model encompasses mechanical,thermal,and electrical domains to facilitate...; 关键词：cmos interface circuits CMOS MEMS flow sensing socthe monolithic calorimetric flow sensing compensation strategy mems sensor variable temperature difference heating circuitresults linear programming

一种用于单细胞阻抗检测的CMOS-MEMS单芯片电化学阻抗传感器: 《微纳电子技术》2024年第12期114-121,共8页聂鉴卿蔡盛训王琨关一民刘德盟; 国家自然科学基金(82130069)。; 传统的基于贵金属的共面电极价格昂贵,且难以与互补金属氧化物半导体(CMOS)工艺集成,阻碍了采用共面电极的传感器的量产与大规模应用。开发了一种基于微机电系统(MEMS)工艺的共面钽电极电化学阻抗传感器,该传感器集成了精准微泵和微流道...; 关键词：单细胞阻抗检测共面钽电极微型阻抗传感器精准微泵互补金属氧化物半导体(CMOS)工艺兼容

A multichannel thermal bubble-actuated impedance flow cytometer with on-chip TIA based on CMOS-MEMS: 《Journal of Semiconductors》2024年第5期41-49,共9页Shengxun Cai Jianqing Nie Kun Wang Yimin Guan Demeng Liu; supported by the Key Project of the National Natural Science Foundation of China(Grant No.82130069).; Electrochemical impedance spectroscopy(EIS)flow cytometry offers the advantages of speed,affordability,and portability in cell analysis and cytometry applications.However,the integration challenges of microfluidic and...; 关键词：EIS flow cytometry CMOS-MEMS thermal bubble LAB-ON-CHIP

Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis: 《Microsystems & Nanoengineering》2023年第6期281-295,共15页Avisek Roy Bao Q.Ta Mehdi Azadmehr Knut E.Aasmundtveit; The Research Council of Norway is acknowledged for the support of the Norwegian Micro-and Nano-Fabrication Facility,NorFab,project number 245963/F50;the Norwegian PhD Network on Nanotechnology for Microsystems,Nano-Network,project number 221860/F60。; Carbon nanotubes(CNTs)can be locally grown on custom-designed CMOS microheaters by a thermal chemical vapour deposition(CVD)process to utilize the sensing capabilities of CNTs in emerging micro-and nanotechnology appl...; 关键词：SYNTHESIS STEPS DAMAGE

Design,fabrication,characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers被引量：3: 《Microsystems & Nanoengineering》2022年第5期17-41,共25页J.J.Valle J.M.Sánchez-Chiva D.Fernández J.Madrenas; supported by Baolab Microsystems and by the Spanish Ministry of Science,Innovation and Universities,the State Research Agency(AEI),and the European Social Fund(ESF)under project RTI2018-099766-B-I00.; This article presents several design techniques to fabricate micro-electro-mechanical systems(MEMS)using standard complementary metal-oxide semiconductor(CMOS)processes.They were applied to fabricate high yield CMOS-M...; 关键词：LORENTZ MAGNETOMETER CHARACTERIZATION

集成隐藏式3维梳齿电极驱动器的低吸合电压CMOS-MEMS微镜阵列被引量：1: 《复旦学报（自然科学版）》2022年第1期61-68,共8页程正喜刘亦徐鹤靓康晓旭; 国家自然科学基金(61874127);上海浦江人才计划(18PJ1410700)。; 微镜阵列芯片是大尺寸画面投影显示系统的主流光学图形产生器。针对德州仪器公司的数字微镜芯片中微镜吸合电压较高的问题,本文采用CMOS后端金属互连层制备隐藏垂直梳齿电极驱动的低吸合电压微镜,在CMOS后端工艺中基本完成MEMS微镜阵列...; 关键词：微镜吸合电压垂直3维梳齿电极驱动器

CMOS-MEMS薄膜热导率的测量: 《电子与封装》2022年第2期88-88,共1页宋翔宇许威; 随着集成电路(IC)特征尺寸的缩小,CMOS微电子器件发热功率密度急剧增加,相应热能在不同薄膜层内传输。为了助力IC芯片封装热管理及MEMS热学芯片的设计与优化,CMOS-MEMS薄膜热导率的测量尤为重要,然而现有技术很难在芯片实际工作中进行...; 关键词：微电子器件助理教授热导率薄膜层特征尺寸 IC芯片测量方案功率密度

基于CMOS-MEMS工艺的高深宽比体硅刻蚀方法的研究: 《电子技术应用》2018年第10期32-36,40,共6页张海华吕玉菲鲁中轩; 为了满足提高MEMS传感器阵列的集成度和精度以及降低成本等需求,对高深宽比的体硅深槽刻蚀方法进行研究。在一种小尺寸、高集成度的MEMS传感器阵列的制造中,需要加工一种深宽比为25μm/0.8μm的隔离深槽,并且为了便于MEMS传感器和CMOS...; 关键词：CMOS-MEMS工艺高深宽比深槽刻蚀 RIE和Bosch工艺

MEMS-based thermoelectric infrared sensors： A review被引量：12: 《Frontiers of Mechanical Engineering》2017年第4期557-566,共10页Dehui XU Yuelin WANG Bin XIONG Tie LI; In the past decade, micro-electromechanical systems （MEMS）-based thermoelectric infrared （IR） sensors have received considerable attention because of the advances in micromachining technology. This paper presents ...; 关键词：thermoelectric infrared sensor CMOS-MEMS THERMOPILE MICROMACHINING wafer-level package

基于CMOS-MEMS工艺的小量程电容式压力传感器设计被引量：6: 《仪表技术与传感器》2016年第1期19-21,32,共4页张瑞梁庭贾平岗刘雨涛王涛龙王心心熊继军; 小量程压力传感器研制的主要目的是解决低压环境下的压力测量问题。结合CMOS-MEMS技术,提出了一种小量程电容式压力传感器设计方案。利用ANSYS软件分析了传感器压敏结构的静力学性能和动力学性能,验证了理论设计的可行性。传感器可动上...; 关键词：小量程电容式 CMOS-MEMS 压力传感器

CMOS-MEMS