Sensitivity of MEMS microwave power sensor with the length of thermopile based on Fourier equivalent model  

作　　者：刘彤 廖小平 王德波 

机构地区：[1]Key Laboratory of MEMS of Ministry of Education,Southeast University

出　　处：《Journal of Semiconductors》2011年第7期52-56,共5页半导体学报（英文版）

基　　金：Project supported by the National Natural Science Foundation of China(Nos.61076108,60976094,60676043);the National High Technology Research and Development Program of China(No.2007AA04Z328)

摘　　要：A Fourier equivalent model is introduced to research the thermal transfer behavior of a terminating-type MEMS microwave power sensor.The fabrication of this MEMS microwave power sensor is compatible with the GaAs MMIC process.Based on the Fourier equivalent model,the relationship between the sensitivity of a MEMS microwave power sensor and the length of thermopile is studied in particular.The power sensor is measured with an input power from 1 to 100 mW at 10 GHz,and the measurement results show that the power sensor has good input match characteristics and high linearity.The sensitivity calculated from a Fourier equivalent model is about 0.12,0.20 and 0.29 mV/mW with the length at 40,70 and 100μm,respectively,while the sensitivity of the measurement results is about 0.10,0.22 and 0.30 mV/mW,respectively,and the differences are below 0.02 mV/mW. The sensitivity expression based on the Fourier equivalent model is verified by the measurement results.A Fourier equivalent model is introduced to research the thermal transfer behavior of a terminating-type MEMS microwave power sensor.The fabrication of this MEMS microwave power sensor is compatible with the GaAs MMIC process.Based on the Fourier equivalent model,the relationship between the sensitivity of a MEMS microwave power sensor and the length of thermopile is studied in particular.The power sensor is measured with an input power from 1 to 100 mW at 10 GHz,and the measurement results show that the power sensor has good input match characteristics and high linearity.The sensitivity calculated from a Fourier equivalent model is about 0.12,0.20 and 0.29 mV/mW with the length at 40,70 and 100μm,respectively,while the sensitivity of the measurement results is about 0.10,0.22 and 0.30 mV/mW,respectively,and the differences are below 0.02 mV/mW. The sensitivity expression based on the Fourier equivalent model is verified by the measurement results.

关 键 词：MEMS THERMOPILE microwave power sensitivity 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TU452[自动化与计算机技术—控制科学与工程]