氢气传感器研究型实验教学设计  

Design of Research Experimental Teaching for Hydrogen Sensor

作　　者：耿志挺[1] GENG Zhiting(National Demonstration Center for Experimental Advanced Materials Education,Tsinghua University,Beijing 100084,China)

机构地区：[1]清华大学先进材料国家级实验教学示范中心,北京100084

出　　处：《实验室研究与探索》2023年第9期211-214,共4页Research and Exploration In Laboratory

基　　金：清华大学实验室创新基金项目(53100990222)。

摘　　要：依托科研项目及清华大学实验室创新基金,开展了关于钯-银合金氢气传感器的制备及性能研究的实验教学。围绕钯-银合金薄膜的制备、微结构、表面形貌和电学性能表征,介绍了半导体薄膜研究型实验教学的内容和实施方法,激发了学生的科学研究兴趣,探讨了研究型实验教学对培养学生创新思维和科研能力所起的作用。Base on the scientific research projects and Tsinghua University Laboratory Innovation Fund,experimental teaching on the preparation and performance research of palladium-silver alloy thin film hydrogen sensor is carried out.Focusing on the preparation,microstructure,surface morphology and electrical performance characterization of palladium-silver alloy thin film,the contents and implementation methods of research-type experimental teaching of semiconductor thin film are introduced in detail.The interesting in scientific research of students is stimulated.The role of cultivating students innovative thinking and scientific research ability is discussed to the research-type experimental teaching.

关 键 词：氢气传感器 钯-银合金 半导体薄膜 研究型实验 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]