TiN硬质陶瓷薄膜研究进展  

Research Progress of TiN Hard Ceramic Films

作　　者：杨海 陆昆[1] Yang Hai;Lu Kun(Medical College,Chuzhou City Vocational College,Chuzhou 239000,China)

机构地区：[1]滁州城市职业学院医学院,安徽滁州239000

出　　处：《山东化工》2023年第18期109-111,共3页Shandong Chemical Industry

基　　金：安徽省自然科学重点项目(KJ2020A1004)。

摘　　要：TiN薄膜具有优异的综合性能而受到广泛应用和研究。综述了TiN薄膜的多种制备技术,介绍了制备技术和工艺参数对TiN薄膜结构和性能影响,阐述了TiN薄膜应用领域,最后展望了TiN薄膜未来发展方向。TiN films are widely used and studied due to their excellent comprehensive properties.Various preparation techniques of TiN thin films are reviewed.The effects of preparation techniques and process parameters on the structure and properties of TiN thin films are introduced.The application fields of TiN thin films are described.Finally,the future development direction of TiN thin films is prospected.

关 键 词：TIN薄膜 制备 性能 应用 

分 类 号：TQ174[化学工程—陶瓷工业]