微流控系统中压电泵及其应用的研究进展  

Advances in Piezoelectric Pumps and Their Applications in Microfluidic Systems

作　　者：齐振翔 接勐[2] 马腾飞 Qi Zhenxiang;Jie Meng;Ma Tengfei(School of Information and Control Engineering,Jilin Institute of Chemical Technology,Jilin,Jilin 132022,China;College of Mechanical and Electrical Engineering,Jilin Institute of Chemical Technology,Jilin,Jilin 132022,China)

机构地区：[1]吉林化工学院信息与控制工程学院,吉林吉林132022 [2]吉林化工学院机电工程学院,吉林吉林132022

出　　处：《机电工程技术》2023年第11期5-10,22,共7页Mechanical & Electrical Engineering Technology

摘　　要：微流控系统作为微机电系统的一个重要分支,被广泛应用于微尺度环境下的航空航天、生物医疗、化学检测等领域。压电泵作为微流控系统的“心脏”,负责为微流控系统提供动力,体现了微流控系统的发展水平。压电泵将驱动部件、工作部件和控制部件集为一体,有效减少传统泵类中由于不同部件在运动过程中产生的能量损耗,具有体积小、结构简单、能耗低等特点。介绍了近年来国内外关于压电泵的研究成果,并根据压电泵的相关结构、工作模式等方面进行分类、归纳、总结,分析目前压电泵发展过程中存在的主要问题,并从多方面讨论压电泵的性能优化研究,对其潜在的应用前景及发展趋势进行展望,给开展压电泵技术研究提供一定参考。Microfluidic systems,as an important branch of microelectromechanical systems,are widely used in aerospace,biomedical,chemical detection and other fields in micro-scale environments.As the"heart"of the microfluidic system,the piezoelectric pump is responsible for providing power to the microfluidic system,reflecting the level of development of the microfluidic system.The piezoelectric pump combines the drive,working and control components into one,which effectively reduces the energy loss in the traditional pump due to the different components in the process of movement,and has the characteristics of small size,simple structure and low energy consumption.The research results of piezoelectric pumps at home and abroad in recent years are introduced,classified,summarized,and concluded according to the relevant structure and working mode of piezoelectric pumps,the main problems existing in the development process of piezoelectric pumps are analyzed and the performance optimization research of piezoelectric pumps from various aspects is discussed,an outlook on its potential application prospects and development trend is given,providing a certain reference for the development of piezoelectric pump technology research.

关 键 词：压电泵 截止阀 腔体 压电振子 压电叠堆 

分 类 号：TH138[机械工程—机械制造及自动化] S277.9[农业科学—农业水土工程]