新型酸铜电镀加速剂MA的应用研究  

Application research of new acid copper electroplating accelerator MA

作　　者：兰岚 王翀 王朋举 明小强 朱永康 黄清华 何为 周国云 Lan Lan;Wang Chong;Wang Pengju;Ming Xiaoqiang;Zhu Yongkang;Huang Qinghua;He Wei;Zhou Guoyun(School of Materials and Energy,University of Electronic Science and Technology of China,Chengdu 610054,China;Jiangsu Mingfeng Electronic Materials Technology Co.,Ltd.,Changzhou 213300,China;Netron Soft-Tech(Zhuhai)Co.,Ltd.,Zhuhai 519040,China)

机构地区：[1]中国电子科技大学材料与能源学院,四川成都610054 [2]江苏铭丰电子材料有限公司,江苏常州213300 [3]奈电软性科技电子(珠海)有限公司,广东珠海519040

出　　处：《电镀与精饰》2023年第12期64-70,共7页Plating & Finishing

基　　金：国家自然科学基金面上项目(22172020)和专项项目(22241201);珠海市创新创业团队项目(ZH0405190005PWC);珠海市科技计划项目(ZH22044702190033HJL)

摘　　要：酸性电镀铜是重要的电子互连制造技术之一。为解决其工业生产过程中,聚二硫二丙烷磺酸钠(SPS)和3-巯基-1-丙烷磺酸钠(MPS)稳定性欠佳,导致镀液老化,使添加剂监控失效、镀液均镀能力下降和镀层结瘤等问题,通过电化学实验、定量分析实验和电镀实验,研究了巯基丙烷磺酸络二铜(MA)作为电子互连中酸铜电镀加速剂的特性。结果表明,MA能够直接替代原配方中的SPS和MPS,作为酸铜加速剂使用,且工作浓度更低,具有更宽的CVS分析线性区间,能够提供更准确的定量分析结果,在微通孔保型电镀中表现出良好的均镀能力,并能实现微盲孔的超级填充,不改变铜镀层的金相织构等,展现出广阔的应用前景。Acid copper electroplating is the most essential technology for the interconnects production.In order to solve the problems of additive monitoring failure,throwing ability of plating solution decreases and coating nodulation while plating solution is aging in acid copper plating caused by the poor chemical stability of SPS and MPS,bi-Cu-mercapto-propane-sulphonate complex(MA)was invited as the accelerator.The accelerating properties and electroplating performance of MA were studied by electrochemical and electroplating experiments.The results show that MA can directly replace SPS and MPS in the original formula,and can be used as an acid copper accelerator with a lower working concentration,a wider linear range of CVS analysis,and more accurate quantitative analysis results.It shows good throwing ability in conformal electroplating,and can realize super filling of micro-blind vias without changing the metallographic texture of copper plating,showing broad application prospects.

关 键 词：电镀铜添加剂 加速剂 浓度分析 均镀能力 巯基丙烷磺酸络合物 

分 类 号：TQ153.14[化学工程—电化学工业]