二维微动平台柔性机构动力学建模与分析  

Dynamic modeling and analysis of flexure mechanism in two-dimensional micro motion stage

作　　者：刘昊 赖磊捷 LIU Hao;LAI Leijie(School of Mechanical and Automotive Engineering,Shanghai University of Engineering Science,Shanghai 201620,China)

机构地区：[1]上海工程技术大学机械与汽车工程学院,上海201620

出　　处：《上海工程技术大学学报》2023年第2期179-183,共5页Journal of Shanghai University of Engineering Science

基　　金：上海市自然科学基金项目资助(21ZR1426000)。

摘　　要：提出一种基于并联柔性机构的两自由度平动解耦并联微动平台.平台采用复合双平行四杆柔性机构模块,采用结构对称约束消除轴间耦合和寄生位移的产生,实现X,Y方向的平动.采用刚度矩阵法对该并联柔性机构进行理论分析,根据观察法建立微动工作台的整体刚度矩阵,得到系统的运动微分方程,推导出系统各阶固有频率.采用有限元分析法对微动工作台进行模态分析,得到微动工作台的固有频率和振型.经过理论分析、有限元计算和试验测试,并对结果进行对比,结果的一致性说明理论分析的正确性和刚度矩阵分析的有效性.A two degree of freedom translational decoupling parallel micropositioning stage based on parallel flexure mechanism was proposed.A compound double parallel four-bar flexure mechanism module was adopted in the stage,and structural symmetry constraints were introduced to eliminate the coupling between shafts and parasitic displacement,and translations in X and Y directions were achieved.The stiffness matrix method was used to analyze the parallel flexure mechanism in theory.According to the observation method,the overall stiffness matrix of the micropositioning stage was established,and the differential equations of motion of the system were obtained,and the natural frequencies of each order of the system were deduced.The modal analysis of the micropositioning stage was carried out by using the finite element method,and the natural frequency and mode shape of the micropositioning stage were obtained.Through theoretical analysis,finite element calculation and experimental test,the consistency of the results shows the correctness of theoretical analysis and the effectiveness of stiffness matrix analysis.

关 键 词：微定位 柔性机构 刚度矩阵 有限元 

分 类 号：TH112[机械工程—机械设计及理论]