用于光学显微成像的无像差双二维微机电系统振镜光束扫描方法  

Aberration-Free Dual 2D MEMS Mirror Scanning Method for Optical Microscopy

作　　者：张国卓 王旭[1] 王允[1] 赵维谦[1] 邱丽荣[1] 崔晗 Zhang Guozhuo;Wang Xu;Wang Yun;Zhao Weiqian;Qiu Lirong;Cui Han(MIIT Key Laboratory of Complex-Field Intelligent Exploration,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]北京理工大学光电学院复杂环境智能感测技术工信部重点实验室,北京100081

出　　处：《光学学报》2023年第21期70-78,共9页Acta Optica Sinica

基　　金：国家杰出青年科学基金(51825501);国家自然科学仪器基金(61827826)。

摘　　要：光束扫描系统在光学显微成像中扮演着重要的角色,针对现有光束扫描中继系统尺寸、像差较大以及装调精度要求高的问题,提出一种双二维微机电系统(MEMS)振镜光束扫描方法。该方法采用两片二维MEMS振镜进行光束远心扫描,其中,一片MEMS振镜替代传统中继系统中的scan lens和tube lens,避免像差的引入,缩减系统尺寸,最终完成了小型化、结构简单和无像差的光束扫描系统设计。基于该方法构建了小型化共焦扫描显微镜,并对台阶样品进行扫描成像,验证了该方法的可行性。该方法为光学显微成像提供了一种新型的光束扫描手段,可为光学显微成像技术在深空探测、现场检测和生物医学等领域的进一步应用提供一种新的技术途径。Objective Due to its non-invasive,high-resolution,and real-time imaging capabilities,optical scanning microscopy has been widely applied in biomedicine,physical chemistry,and materials science to realize three-dimensional imaging detection of cells,tissue analysis,and microstructure samples.Beam scanning systems play an important role in optical microscopy.When scanners are leveraged for scanning and imaging,it is necessary to add a relay system composed of a scan lens and tube lens between the scanner and the objective lens.As a result,the beam does not deviate from the rear pupil of the objective lens to ensure the imaging quality.However,traditional relay systems adopt lenses design,and their inherent defects can cause optical aberration,which affects the resolution of optical microscopy imaging systems.Commercial scan lens and tube lens are optimized to suppress aberrations,but they feature high price,large volume,and long focal length,making them unsuitable for miniaturized design occasions.The relay system composed of doublet lenses can be miniaturized according to requirements,but it is difficult to effectively suppress aberrations,especially under large beam scanning angles.The utilization of parabolic reflectors to form a relay system can effectively eliminate the chromatic aberration,but the coma aberration of the reflection system is difficult to eliminate.This is the same as the lens relay system,which requires a one-to-one correspondence of the focal position and high installation accuracy.Therefore,how to design aberration-free beam scanning systems with miniaturization and simple structures is still an important problem facing optical microscopy imaging technology.Methods Aiming at the large size,large aberration,and high alignment accuracy of the relay systems in existing beam scanning systems,we propose a dual two-dimensional(2D)MEMS mirror beam scanning method.This method adopts two 2D MEMS mirrors to realize beam telecentric scanning.One mirror replaces the scan lens and tube lens in the tradit

关 键 词：双二维微机电系统振镜 光束扫描 无像差 小型化 扫描成像 共焦 

分 类 号：O439[机械工程—光学工程]