激光差动共焦透镜中心偏的自动测量  

Automatic measurement of center deviation of lens of laser differential confocal

作　　者：王伟[1] 杜卓 程然 赵维谦[1] 王允[1] 邱丽荣[1] WANG Wei;DU Zhuo;CHENG Ran;ZHAO Weiqian;WANG Yun;QIU Lirong(MIIT Key Laboratory of Complex-field Intelligent Exploration,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]北京理工大学光电学院复杂环境智能感测技术工信部重点实验室,北京100081

出　　处：《光学精密工程》2023年第23期3405-3413,共9页Optics and Precision Engineering

基　　金：中央高校基本科研业务费专项资金资助项目(No.2023CX01006);民用航天技术预先研究项目(No.D020402);国家自然科学基金杰出青年基金资助项目(No.51825501)。

摘　　要：针对现有中心偏差测量方法中测量精度低、透镜姿态调整人为干扰大的问题,提出一种差动共焦透镜中心偏自动测量方法。该方法通过差动共焦定焦技术,依据差动共焦轴向光强响应曲线的过零点精确对应被测镜特征点这一特性,实现对被测镜猫眼点及共焦点的精准定位;通过高精度气浮转轴驱动被测镜旋转,用位移传感器、圆光栅记录被测镜的位置信息,结合五维位姿自动调整机构,实现对被测镜姿态的高精度校正,消除姿态偏差,提高测量精度;最终,搭建了激光差动共焦透镜中心偏自动测量系统,实现了透镜中心偏的高精度自动测量。实验结果表明:透镜中心偏的测量精度可达0.41%,测量重复性优于100 nm。与现有的人工单次测量相比,该方法的测量重复性较好、随机误差小、测量精度高,为高精度透镜中心偏自动测量提供了一种技术途径。To address the problems of low measurement accuracy and significant human interference in lens position adjustment in existing center deviation measurement methods,this paper proposes an automatic measurement method for the center deviation of differential confocal lenses.This method uses differential confocal focusing technology to precisely locate the cat's eye and confocal points of the measured lens,based on the fact that the zero point of the differential confocal axial light intensity response curve corresponds precisely to the characteristic point of the measured lens.The high-precision air-bearing rotating shaft drives the rotation of the measured mirror,while the displacement sensor records the position information of the measured mirror.In combination with the five-dimensional posture automatic adjustment mechanism,the high-precision correction of the attitude deviation of the measured mirror was realized,the eccentricity error was eliminated,and the measurement accuracy was improved.Finally,a laser differential confocal lens center deviation measurement system was established,which automatically measured the lens center deviation with high precision.The experimental results show that the measurement accuracy of the lens eccentricity can reach 0.41%,while the measurement repeatability is greater than 100 nm.Com-pared with the existing manual single measurement method,the proposed method has good repeatability,small random error,and high measurement accuracy.It serves as a new technical approach for the auto-matic measurement of lens eccentricity with high precision.

关 键 词：激光测量 差动共焦 中心偏 自动调整 自动测量 姿态偏差 

分 类 号：TN249[电子电信—物理电子学] TH691.9[机械工程—机械制造及自动化]