SiC的纳秒脉冲激光烧蚀特性  

Ablation Properties of Nanosecond Laser-Irradiated SiC Material

作　　者：张黎[1] 陶彦辉[1] 黄元杰[1] 殷乾峰 陈加政 张永强[1] 谭福利[1] ZHANG Li;TAO Yanhui;HUANG Yuanjie;YIN Qianfeng;CHEN Jiazheng;ZHANG Yongqiang;TAN Fuli(Institute of Fluid Physics,China Academy of Engineering Physics,Mianyang 621999,Sichuan,China)

机构地区：[1]中国工程物理研究院流体物理研究所,四川绵阳621999

出　　处：《高压物理学报》2023年第6期69-74,共6页Chinese Journal of High Pressure Physics

摘　　要：建立了纳秒脉冲激光烧蚀SiC的实验平台和激光烧蚀诱导等离子体的实验测量系统,并采用一维流体力学程序模拟了高功率激光烧蚀SiC的过程和烧蚀过程中产生等离子体射流的动力学过程,获得了纳秒激光对SiC的烧蚀规律,研究了激光烧蚀过程中产生的等离子体对烧蚀效率的影响。研究结果可为纳秒激光烧蚀材料的相关工程化应用提供参考。A nanosecond pulsed laser ablation platform of SiC material and a nanosecond pulsed laser induced plasma experimental system were established.One dimensional fluid mechanics code was used to simulate the dynamic process of plasma jet generated by high power laser during the ablation of SiC material.The nanosecond pulsed laser ablation rule of SiC material was obtained,and the effect of laser induced plasma on ablation depth was verified through experiment and numerical simulation.The research results can provide reference for material engineering applications related to nanosecond laser ablation.

关 键 词：SIC 纳秒脉冲激光烧蚀 激光辐照 激光诱导等离子体 

分 类 号：O484[理学—固体物理] TN249[理学—物理]