半导体制造装备用阀门技术发展现状  

State-of-art of valve technology used in semiconductor manufacturing equipment

作　　者：陈林[1] 茅岭峰 CHEN Lin;MAO Lingfeng(Jiangsu Shentong Valve Co.,Ltd.,Qidong 226232,China)

机构地区：[1]江苏神通阀门股份有限公司,江苏启东226232

出　　处：《流体机械》2023年第10期43-48,共6页Fluid Machinery

基　　金：江苏省企业重点实验室资助项目(BM2014013)。

摘　　要：针对目前国内半导体制造装备用阀门研究极少和国产化所面临的诸多困难,对半导体制造装备用阀门的技术发展水平进行了综述,介绍了半导体制造装备用阀门的主要制造工艺和设备以及目前国内外超高真空阀门的研究现状,总结了半导体制造用阀门具有高洁净度、长寿命、超高真空密封性能和精密控制等显著特点;指出了实现国产化面临着磨损粒子产生机理不明、缺乏相应长寿命的配套件和产品技术标准缺失等主要挑战,并对半导体制造装备用阀门国产化的开展给出了具体建议。For the problems of very little research on valves for semiconductor manufacturing in China and the many difficulties faced in localization,the technical development level of valves for semiconductor manufacturing equipment was reviewed,the main manufacturing processes and equipment of valves for semiconductor manufacturing equipment,as well as the current research status of ultra-high vacuum valves at home and abroad were introduced.It was summarized that the valves for semiconductor manufacturing have obvious features such as high cleanliness,long service life,ultra-high vacuum sealing performance and precision control;The main challenges faced in achieving localization,such as unclear mechanism of wearing particle generation,lack of corresponding long-life supporting parts and lack of product technical standards,were pointed out,and specific suggestions were given for the localization of valves for semiconductor manufacturing equipment.

关 键 词：半导体制造 超高真空阀门 国产化 高清洁度 长寿命 

分 类 号：TH138[机械工程—机械制造及自动化] TP206[自动化与计算机技术—检测技术与自动化装置]