液体辅助氮化铝陶瓷飞秒激光直冲式盲孔加工  

Liquid-A ssisted Aluminium Nitride Ceramics Femtosecond Laser Direct-Punch Blind Hole Processing

作　　者：王宁 马盼 王旭 刘浩东 赵万芹[3] WANG Ning;MA Pan;WANG Xu;LIU Haodong;ZHAO Wanqin(School of Materials Science and Engineering,Shanghai University of Engineering Science,Shanghai 201620,China;AVIC Shenyang Aircraft Corporation,Shenyang 110034,China;State Key Laboratory for Manufacturing System Engineering,Xi′an Jiaotong University,Xi′an 710054,China)

机构地区：[1]上海工程技术大学材料科学与工程学院,上海201620 [2]沈阳飞机工业(集团)有限公司,辽宁沈阳110086 [3]西安交通大学机械制造系统工程国家重点实验室,陕西西安710064

出　　处：《轻工机械》2023年第6期82-86,共5页Light Industry Machinery

基　　金：国家自然科学基金(52105465)。

摘　　要：为探究采用液体辅助加工技术提高飞秒激光直冲式盲孔加工质量的可行性,课题组设计了一种液体辅助激光加工装置。选择纯水、质量分数为75%的乙醇溶液以及盐酸乙醇混合溶液作为辅助液体用于激光加工,在激光加工参数重复频率为0.3 MHz、单脉冲能量为20μJ、脉冲数为250~20 000时,探究了不同液体辅助加工条件下盲孔尺寸和盲孔的孔口、侧壁形貌变化规律,并分析了相关形貌和缺陷的产生原因和机理。结果表明:在盐酸乙醇混合溶液中进行直冲式盲孔加工,加工出的盲孔孔形相对规整,孔口和侧壁的形貌质量较高。液体辅助激光加工是提高氮化铝陶瓷飞秒激光直冲式盲孔加工质量的一种有效方法。To investigate the feasibility of using liquid-assisted processing technology to improve the quality of femtosecond laser direct punching blind hole,a liquid-assisted laser processing device was designed.Pure water,an ethanol solution with a mass fraction of 75%and a hydrochloric acid-ethanol mixture were selected as auxiliary fluids for liquid-assisted laser processing.The changes rules in blind hole size and the morphology of blind hole openings and sidewalls under different liquid assisted processing conditions were investigated,when the laser processing parameters were repetition frequency of 0.3 MHz and single pulse energy of 20μJ and the pulses of 250 to 20000.And the causes and mechanisms of related morphologies and defects were analyzed.The results show that direct punching of blind hole in a mixture of hydrochloric acid and ethanol results in relatively well-processed blind holes with high quality orifices and sidewalls.Liquid-assisted laser processing is an effective method for improving the quality of femtosecond laser direct-punch blind hole in aluminium nitride ceramics.

关 键 词：激光加工 氮化铝陶瓷 盲孔 液体辅助 

分 类 号：TN249[电子电信—物理电子学] TH161[机械工程—机械制造及自动化]