MEMS高温压阻式压力传感器闭环控制方法  

Closed loop Control Method of MEMS High Temperature Piezoresistive Pressure Sensor

作　　者：杨恩龙 殷展 魏毅 杨清海 YANG Enlong;YIN Zhan;WEI Yi;YANG Qinghai(Jiading Power Supply,State Grid Shanghai Electric Power Company,Shanghai 201800,China)

机构地区：[1]国网上海市电力公司嘉定供电公司,上海201800

出　　处：《机械与电子》2023年第12期27-30,37,共5页Machinery & Electronics

基　　金：国家电网有限公司科技项目(SGSHJD00BGJS2101991)。

摘　　要：为提高MEMS高温压阻式压力传感器的整体性能,提出一种MEMS高温压阻式压力传感器闭环控制方法。明确MEMS高温压阻式压力传感器在工作过程中产生的变谐效应,分析了静电驱动和电容检测。根据分析结果设计出闭环控制策略,在闭环控制过程中采用二元差值算法补偿传感器的温度误差,提高控制精度。通过灵敏度校准和零点失调校准,实现了MEMS高温压阻式压力传感器的闭环控制。试验结果表明,所提方法的控制精度高、信号采集准确率高及控制性能好。In order to improve the overall performance of MEMS high temperature piezoresistive pressure sensor,a closed loop control method of MEMS high temperature piezoresistive pressure sensor is proposed.The harmonic effect of MEMS high temperature piezoresistive pressure sensor in the working process is clarified,and the electrostatic driving and capacitance detection are analyzed.According to the analysis results,the closed loop control strategy is designed.In the closed loop control process,the binary difference algorithm is used to compensate the temperature error of the sensor and improve the control accuracy.Through sensitivity calibration and zero offset calibration,the closed loop control of MEMS high temperature piezoresistive pressure sensor is realized.The experimental results show that the proposed method has high control accuracy,high signal acquisition accuracy and good control performance.

关 键 词：MEMS高温压阻式压力传感器 变谐效应分析 二元差值算法 误差补偿 闭环控制 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]