空间飞行器用薄膜温度/应变传感技术研究  

Review of Thin Film Temperature and Strain Sensor Technologies for Spacecraft

作　　者：马东锋 熊玉卿[1] 何延春[1] 张凯峰[1] 曹生珠[1] MA Dongfeng;XIONG Yuqing;HE Yanchun;ZHANG Kaifeng;CAO Shengzhu(Science and Technology in Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2024年第1期10-22,共13页Vacuum and Cryogenics

基　　金：甘肃省青年科技基金(22JR5RA788)。

摘　　要：随着功能薄膜制备方法及微细加工技术的日益成熟,基于各类薄膜敏感元件的薄膜传感技术蓬勃发展。薄膜传感器件尺寸小、集成度高、灵敏度高,在深空探测、空间飞行器结构健康监测、载人航天等领域展现出广阔的应用前景。针对空间飞行器的各类传感需求,对低温/高温温度传感、热流传感、高温应变传感、柔性大应变传感、柔性智能蒙皮等应用中薄膜传感材料和器件的关键技术及国内外研究现状进行了综述,并对薄膜传感技术的未来发展进行了展望。With the increasing maturity of thin film preparation methods and micro-machining technologies,thin film sensor technologies based on various thin film sensitive elements are experiencing significant development.The advantages of small size,high integration,and high sensitivity of thin film sensors make them show excellent prospects for aerospace applications such as deep space exploration,spacecraft structural health monitoring,manned spaceflight,etc.In this paper,thin film temperature sensing and strain sensing technologies were discussed.According to different sensing applications in spacecraft,the key technologies and research status of thin film sensing materials and devices in cryogenic/high temperature measurement,heat flux sensing,strain sensing at high temperature,and flexible large strain sensing,flexible intelligent skin are reviewed.Finally,the developing trends of thin film sensors are prospected.

关 键 词：薄膜传感器 温度传感 应变传感 智能蒙皮 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] V443[自动化与计算机技术—控制科学与工程]