高性能温补型薄膜体声波滤波器的研制  

Development of High Performance TC-FBAR

作　　者：刘娅[1] 陈凤 黄晶 黄龙 吕峻豪 孙明宝 马晋毅[1] LIU Ya;CHEN Feng;HUANG Jing;HUANG Long;LYU Junhao;SUN Mingbao;MA Jinyi(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2023年第6期795-799,共5页Piezoelectrics & Acoustooptics

摘　　要：该文研制了一种高性能温补型薄膜体声波谐振(TC-FBAR)滤波器。采用COMSOL软件对高性能温补型结构的谐振器进行建模和仿真,在常规一维Mason等效电路模型的基础上进行修正,再在ADS中对滤波器进行仿真优化设计,得到阶梯型结构的TC-FBAR滤波器。采用空腔型结构并制备出温补型FBAR滤波器芯片,同时在常规TC-FBAR基础上制备空气桥和凸起层结构,得到双空气桥结构的高性能TC-FBAR滤波器。测试结果表明,滤波器的中心频率为2.43 GHz,最小插损为1.02 dB,1 dB带宽为70.5 MHz,频率温度系数为1.82×10^(-6)/℃。In this paper,a high performance temperature compensation thin film bulk acoustic resonator(TC-FBAR)filter is developed.The COMSOL software is used to model and simulate the resonator with high performance thermal compensation structure,and the model is modified on the basis of the conventional one-dimensional Mason equivalent circuit model,and then the filter is simulated and optimized in ADS,finally,the TC-FBAR filter with stepped structure is realized.The temperature compensation FBAR filter chip is fabricated by using the cavity structure.On the basis of the conventional TC-FBAR,the air bridge and convex structure are prepared,thus the high performance TC-FBAR filter with dual air bridge structure is obtained.The test results show that the center frequency of the filter is^(2).43 GHz,the minimum insertion loss is 1.02 dB,1 dB bandwidth is 70.5 MHz,and frequency temperature coefficient is 1.82×10^(-6)/℃.

关 键 词：温补型薄膜体声波谐振器(TC-FBAR) 滤波器 温补层 频率温度系数(TCF) 

分 类 号：TN65[电子电信—电路与系统]