功率VDMOS器件辐射效应研究进展  

Research Progress in Radiation Effects of Power VDMOS Devices

作　　者：张玉宝 魏亚东 杨剑群[2,3] 蒋继成 姚钢 李兴冀 Zhang Yubao;Wei Yadong;Yang Jianqun;Jiang Jicheng;Yao Gang;Li Xingji(Heilongjiang Institute of Atomic Energy,Harbin 150086,China;School of Materials Science and Engineering,Harbin Institute of Technology,Harbin 150001,China;Chongqing Research Institute,Harbin Institute of Technology,Chongqing 401120,China)

机构地区：[1]黑龙江省原子能研究院,哈尔滨150086 [2]哈尔滨工业大学材料科学与工程学院,哈尔滨150001 [3]哈尔滨工业大学重庆研究院,重庆401120

出　　处：《黑龙江科学》2023年第24期1-8,共8页Heilongjiang Science

基　　金：黑龙江省科学院科学研究基金(KY2022YZN03)资助。

摘　　要：垂直沟道双扩散金属-氧化层-半导体场效应晶体管(VDMOS)是一类继MOSFET之后发展起来的高效功率开关器件,其沟道长度由外延层的厚度来控制,适合于MOS器件向短沟道尺寸发展,可提高器件的高频性能及工作效率。功率VDMOS晶体管是一类适用于开关应用和线性应用的功率器件,在空间卫星电子系统中具有广阔的应用空间。从功率VDMOS器件结构及基本工作机制入手,梳理了其工作原理,总结了总剂量效应、单粒子效应、位移效应及剂量率效应对VDMOS器件性能的影响,从微观进行机制分析,对抗辐射加固方法进行总结,以提高VDMOS器件的可靠性,为改进抗辐射器件制造工艺及结构设计奠定基础。Vertical channel double diffused metal-oxide-semiconductor field-effect transistors(VDMOS)are a new class of high-efficiency power switching devices developed after MOSFETs.The channel length is controlled by the thickness of the epitaxial layer,so it is suitable for the development of MOS devices to short channel size,so as to improve the high frequency performance and working efficiency of the devices.Power VDMOS transistors is a kind of power device suitable for switching and linear applications,and also has a wide range of applications in space satellite electronic systems.Through starting from the structure and basic working mechanism of power VDMOS devices,the study sorts out the basic working principle of VDMOS devices;summarizes the effects of total dose effect,single particle effect,displacement effect and dose rate effect on the performance of VDMOS devices;analyzes the mechanism from the microscopic point of view;and summarizes the existing anti-radiation hardening methods,so as to provide guidance for improving the reliability of existing VDMOS devices,and lay foundation for improving the manufacturing process and structural design of anti-radiation devices in the future.

关 键 词：VDMOS 电离辐射 总剂量 辐射效应 

分 类 号：TN386[电子电信—物理电子学]