基于压电微机械超声换能器的扫描式手势识别传感器  

Scanning Gesture Recognition Sensor Based on Piezoelectric Micromechanical Ultrasonic Transducer

作　　者：张士钦 胡益民 苗斌[1,2] 王光华 李加东 Zhang Shiqin;Hu Yimin;Miao Bin;Wang Guanghua;Li Jiadong(Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,China;Key Laboratory of Multifunctional Nanomaterials and Smart Systems,Chinese Academy of Sciences,Suzhou 215123,China;School of Electrical and Mechanical Engineering,Changchun University of Science and Technology,Changchun 130022,China)

机构地区：[1]中国科学院苏州纳米技术与纳米仿生研究所,江苏苏州215123 [2]中国科学院多功能材料与轻巧系统重点实验室,江苏苏州215123 [3]长春理工大学机电工程学院,长春130022

出　　处：《微纳电子技术》2023年第11期1808-1816,共9页Micronanoelectronic Technology

基　　金：国家自然科学基金(面上项目)(52172005)。

摘　　要：超声手势识别是实现非接触交互的重要方式之一。基于压电微机械超声换能器(PMUT)的手势识别传感器具有功耗低、体积小、不受环境光影响等优点,当前主要是基于PMUT阵列的方式实现,提出了一种基于单振元PMUT的扫描式手势识别传感器。该传感器由PMUT及电磁驱动单元组成,设计并制备了1.6 mm×1.6 mm的单振元PMUT,振膜半径为500μm,谐振频率为108 kHz,完成了PMUT与电磁驱动单元集成,电磁驱动单元驱动PMUT实现手势扫描,利用多层感知机(MLP)模型完成了手势识别测试。实验结果表明:该扫描式手势识别传感器可实现检测距离为150~600 mm、角度为180°范围内的6种手势识别,平均识别准确率最高为85.66%。Ultrasound gesture recognition is one of the important ways to achieve contactless interaction.The gesture recognition sensor based on piezoelectric micromechanical ultrasonic transducer(PMUT)has the advantages of low power consumption,small size,no influence of ambient light.At present,it is mainly implemented based on PMUT array.A scanning gesture recognition sensor based on single vibrator PMUT was proposed.The sensor is composed of PMUT and electromagnetic drive unit.A single vibrator PMUT of 1.6 mm×1.6 mm was designed and prepared.The diaphragm radius is 500μm and the resonance frequency is 108 kHz.The integration of PMUT and electromagnetic driver unit was completed,the electromagnetic driver unit drove PMUT to achieve gesture scanning,and the gesture recognition test was completed by the multilayer perceptron(MLP)model.The experimental results show that the scanning gesture recognition sensor can realize 6 kinds of gesture recognitions within the detection distance of 150-600 mm and angle of 180°,and the average recognition accuracy is 85.66%.

关 键 词：压电微机械超声换能器(PMUT) 手势识别传感器 电磁驱动 超声扫描 多层感知机(MLP) 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]