基于压膜阻尼效应的纳米振动传感光机系统设计  

Design of Opto-Mechanical Nano-Vibration Sensing System Based on Squeeze Film Damping Effect

作　　者：梁亮 梁文峰 翟胜杭 杨铁[2,3] 于鹏 Liang Liang;Liang Wenfeng;Zhai Shenghang;Yang Tie;Yu Peng(School of Mechanical Engineering,Shenyang Jianzhu University,Shenyang 110168,China;State Key Laboratory of Robotics,Shenyang Institute of Automation,Chinese Academy of Sciences,Shenyang 110016,China;Institutes of Robotics and Intelligent Manufacturing Innovation,Chinese Academy of Sciences,Shenyang 110169,China)

机构地区：[1]沈阳建筑大学机械工程学院,沈阳110168 [2]中国科学院沈阳自动化研究所机器人学国家重点实验室,沈阳110016 [3]中国科学院机器人与智能制造创新研究院,沈阳110169

出　　处：《微纳电子技术》2023年第11期1863-1870,共8页Micronanoelectronic Technology

基　　金：国家重点研发计划项目(2020YFB1712700)。

摘　　要：原子力显微镜(AFM)在微纳成像、测量等领域有着举足轻重的作用,然而振动引起的噪声对其成像和测量有较大影响。为减小振动影响,采用双测头差分的方法进行测量成像,而双测头测量系统中测振测头需满足小型化的需求。因此,提出一种基于压膜阻尼效应的纳米振动传感光机系统,旨在满足该需求。通过对系统的光路与结构进行设计,实现系统的小型化,并且仿真验证了设计的合理性。在此基础上,搭建实物进行实验,测量系统的底噪、灵敏度、带宽等参数,以验证理论分析的正确性。实验结果表明:测头部分的尺寸仅为25 mm×40 mm×40 mm,系统的底噪低于150 fm/√Hz,灵敏度为1823 nm/V,带宽为705 Hz,分辨率为0.8 nm。本系统可实现对于AFM测头纳米级的振动测量,为AFM的振动噪声测量提供了一种方法,并且为实现AFM测头微型化提供了参考。Atomic force microscopy(AFM)plays an important role in the field of micro and nano imaging and measurement,however,vibration-induced noise has a significant impact on its imaging and measurement.To reduce the effect of vibration,a dual-probe differential method was used for measurement and imaging,and the vibration measurement probe in the dual-probe measurement system needs to meet the demand of miniaturization.Therefore,an optomechanical nano-vibration sensing system based on squeeze film damping effect was proposed to meet the requirement.The miniaturization of the system was realized by designing the optical path and structure of the system,and the rationality of the design was verified by simulation.On this basis,the actual object was built for experiments to measure the bottom noise,sensitivity,bandwidth and other parameters of the system to verify the correctness of the theoretical analysis.The experimental results show that the size of the probe is only 25 mm×40 mm×40 mm,the bottom noise of the system is less than 150 fm/√Hz,the sensitivity is 1823 nm/V,the bandwidth is 705 Hz,and the resolution is 0.8 nm.The system can realize the vibration measurement of AFM probes at nanoscale,and provide a method for vibration noise measurement of AFMs and a reference for the realization of the miniaturization of AFM probes.

关 键 词：光机系统 压膜阻尼效应 振动测量 纳米级 传感 

分 类 号：TH742[机械工程—光学工程]