溶胶凝胶法制备钽酸锂薄膜及其离子电导率性能研究  

Research on Sol⁃gel Lithium Tantalate Thin Film and Its Ionic Conductivity

作　　者：苏文静 甘治平 金克武 汤永康 李刚 沈洪雪 SU Wenjing;GAN Zhiping;JIN Kewu;TANG Yongkang;LI Gang;SHEN Hongxue(CNBM Research Institute for Advanced Glass Materials Group Co.,Ltd.,Bengbu 233000,Anhui,China;Silica-Based Materials Laboratory of Anhui Province,Bengbu 233000,Anhui,China)

机构地区：[1]中建材玻璃新材料研究院有限公司,安徽蚌埠233000 [2]硅基材料安徽省实验室,安徽蚌埠233000

出　　处：《材料导报》2023年第S02期88-91,共4页Materials Reports

摘　　要：利用溶胶凝胶法,以无水醋酸锂和乙氧基钽为反应前驱物合成了钽酸锂溶胶,将部分溶胶干燥后形成的粉末在600℃的高温下煅烧60 min。分别在石英玻璃、钠钙玻璃和不锈钢衬底上进行了旋涂镀膜,并分别在600℃和400℃下退火处理60 min。利用XRD对煅烧粉末和薄膜进行物相分析,利用SEM、AFM分别对薄膜的膜厚、形貌和粗糙度进行分析,由其形貌图得出薄膜是由大小较为均匀的粒径约几十纳米的颗粒组成,其中膜表面粗糙度小于1 nm。对不锈钢衬底上厚度约500 nm的薄膜在400℃下处理后进行磁控溅射制备不锈钢上电极,利用电化学工作站进行电化学阻抗谱测试,并分析拟合得到LiTaO_(3)薄膜的离子电导率。结果表明,其室温离子电导率可达6.75×10^(-7)S/cm以上,比目前电致变色器件中常用的无机固体电解质的离了电导率要高。Lithium tantalate thin films were prepared by the means of sol⁃gel and spin⁃coating technology on quartz,glass and stainless steel substrates.The as⁃dried powders and thin films on quartz substrates were heated at 600℃for 60 min and their XRD results exhibited a polycrystalline of LiTaO_(3),while films on glass and stainless steel substrates which were heated at 400℃were amorphous.The SEM and AFM images show that the films'surfaces are consisted of small particles of tens of nanometers and have a small roughness of less than 1nm.For the first time,research on the ionic conductivity of sol⁃gel lithium tantalate thin films has been conducted.The results analyzed from the electrochemical impedance spectroscopy show that the ionic conductivity of sol⁃gel LiTaO_(3) thin films with 500 nm thickness heated at 400℃are higher than 6.75×10^(-7) S/cm at room temperature,which are better than the most used solid electrolytes in electrochromic devices.

关 键 词：溶胶凝胶 钽酸锂 固体电解质 旋涂 电化学阻抗谱 离子电导率 

分 类 号：TB321[一般工业技术—材料科学与工程] O484.42[理学—固体物理]