制备参数对氧化铌涂层晶相成分与结合性能的影响  

Effects of Deposition Parameters on Crystal Phase Composition and Bonding Properties of Niobium Oxide Coating

作　　者：姚泉 王皓 潘旭 李海洋 胡旭军 丁泽良[1] YAO Quan;WANG Hao;PAN Xu;LI Haiyang;HU Xujun;DING Zeliang(College of Mechanical Engineering,Hunan University of Technology,Zhuzhou Hunan 412007,China)

机构地区：[1]湖南工业大学机械工程学院,湖南株洲412007

出　　处：《包装学报》2023年第6期34-43,共10页Packaging Journal

基　　金：湖南省教育厅科学研究基金资助项目(20A159)。

摘　　要：为探讨制备参数对直流反应溅射氧化铌涂层晶相成分与结合性能的影响规律,采用不同的氧气流量、功率和沉积时间,通过直流反应溅射技术在AZ31镁合金表面制备了氧化铌涂层。利用X射线衍射仪和X射线光电子能谱仪对涂层进行表征,采用划痕仪测定了涂层的结合力。结果表明:当氧气流量为0.5~3.0 mL/min、功率为60~100 W、沉积时间为3~7 h时,制备参数对氧化铌涂层的晶相结构和化学价态没有影响,但是对涂层的结合性能影响显著。涂层结合力随氧气流量的增大而减小,随溅射功率和沉积时间的增加而先增大后减小。当溅射功率为80 W(W3试样)和沉积时间为300 min(T3试样)时,涂层的结合力分别为最大。To investigate the influence of deposition parameters on the crystal phase composition and bonding properties of DC reactive sputtered niobium oxide coatings,niobium oxide coatings were prepared on the surface of AZ31 magnesium alloy by DC reactive sputtering technique using different oxygen flow rates,powers and deposition time.The films were characterized by an X-ray diffractometer and X-ray photoelectron spectrometer,and the bonding force of the coatings was determined by a scratch meter.The results showed that when the oxygen flow rate was 0.5~3.0 mL/min,the power was 60~100 W,and the deposition time was 3~7 h,the deposition parameters did not affect the crystalline phase structure and chemical valence state of the niobium oxide coatings,while they had a significant impact on the bonding properties of the layers.The coating bonding decreased with increasing oxygen flow rate,and increased and then decreased with increasing sputtering.When the sputtering power was 80 W(sample W3)and the deposition time was 300 min(sample T3),the binding force of the coating was the largest,respectively.

关 键 词：镁合金 氧化铌 涂层 反应溅射 结合性能 

分 类 号：TG174.4[金属学及工艺—金属表面处理]