基于非本征F-P干涉技术的全光纤位移测量系统  

All-fiber Displacement Measurement System Based on Extrinsic F-P Interferometry

作　　者：马英瀚 张树[2,3] 皮磊 阎晗[1] 胡佳成 施玉书 MA Ying-han;ZHANG Shu;PI Lei;YAN Han;HU Jia-cheng;SHI Yu-Shu(Colloge of Metrology&Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China;Shenzhen Institute of Technology Innovation,National Institute of Metrology,Shenzhen,Guangdong 518107,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]中国计量科学研究院,北京100029 [3]深圳中国计量科学研究院技术创新研究院,广东深圳518107

出　　处：《计量学报》2023年第12期1799-1804,共6页Acta Metrologica Sinica

基　　金：国家重点研发计划(2021YFF0700403)。

摘　　要：为解决传统分离镜组式干涉仪体积较大,无法在空间受限的环境条件下应用的问题,开展了全光纤F-P干涉位移测量技术研究。根据干涉原理分析了不同反射率条件对干涉信号形式的影响,计算得出:当反射率为4%时,多光束干涉的光强信号将近似为正弦函数,并利用有限元仿真对位移测量原理进行验证。设计搭建了基于非本征F-P干涉技术的全光纤位移测量系统。实验结果表明:该系统在1 min内静态噪声电压标准差为23.3 mV;在1 mm位移范围内,该系统与XL-80激光干涉仪的测量结果呈现高度线性关系,线性相关系数R 2为1,且该系统位移测量重复性优于XL-80激光干涉仪。In order to solve the problem that the traditional separation mirror group interferometer is too large to be applied in the environment with limited space,all-fiber F-P interferometry displacement measurement technology is studied.According to the interference principle,the influence of different reflectivity conditions on the interference signal form is analyzed.When the reflectivity is 4%,the light intensity signal of multi-beam interference will be approximately a sine function,and the displacement measurement principle is verified by finite element simulation.An all-fiber displacement measurement system based on extrinsic F-P interferometry is designed and built.The experimental results show that the standard deviation of static noise voltage within 1 min of the system is 23.3 mV,and the linear correlation coefficient R 2 of displacement measurement results between the system and commercial XL-80 laser interferometer is 1 within 1 mm displacement,and the measurement repeatability of the system is better than that of commercial laser interferometer.

关 键 词：计量学 位移测量 光纤传感 F-P干涉技术 激光干涉仪 有限元仿真 

分 类 号：TB921[一般工业技术—计量学]