高精度光栅三维位移敏感结构设计  

Design of high-precision grating three-dimensional displacement sensitive structure

作　　者：王瑞荣[1] 黄刚[1] 李晓红 吕奕菲 WANG Ruirong;HUANG Gang;LI Xiaohong;LU Yifei(Department of Electronic Engineering,Taiyuan Institute of Technology,Taiyuan 030008,China;Xi’an Institute of Applied Optics,Xi’an 710065,China)

机构地区：[1]太原工业学院电子工程系,山西太原030008 [2]西安应用光学研究所,陕西西安710065

出　　处：《传感器与微系统》2024年第1期80-83,共4页Transducer and Microsystem Technologies

基　　金：山西省高等学校科技创新项目(2020L0638)。

摘　　要：针对目前的微位移敏感装置在微型化下难以实现高精度三维检测的问题,设计了面内和离面2种位移敏感的光栅结构,并应用于三维微位移的检测中。阐述了光栅理论,设计了双层光栅结构。从2种检测方式对微位移灵敏度的影响角度,通过Gsolver仿真光强衍射效率的大小变化,面内和离面敏感光栅的衍射效率变化分别为0.115%/nm和0.423%/nm,可知,离面敏感光栅的衍射效率灵敏度是面内敏感光栅的4倍。进而将离面位移敏感的光栅布置在被测物的三维方向,实现高精度三维位移测量。Aiming at the problem that the current micro-displacement sensitive device is difficult to realize high-precision three-dimensional detection under miniaturization,two kinds of displacement-sensitive grating structures in and out of the surface are designed and applied to the detection of three-dimensional micro-displacement.The grating theory is described and a double-layer grating structure is designd.From the perspective of the influence of the two detection methods on the sensitivity of the micro-displacement,the changes of light intensity diffraction effciency is simulated by Gsolver,the diffraction efficiency change of the in-plane and off-plane sensitive grating is 0.115%/nm and 0.423%/nm,respectively,it can be seen that the diffraction efficiency change of the off-plane sensitive grating is four times that of the in-plane sensitive grating.Furthermore,the sensitive grating for the off-plane displacement is arranged in three-dimensional directions of the object to be measured,thereby high-precision three-dimensional displacement measurement is realized.

关 键 词：位移敏感 光栅 高精度 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]