面向大空间建筑的氟化非晶碳薄膜性能调控方法研究  

Performance Regulation Approach of Fluorinated Amorphous Carbon Film for Large-space Building

作　　者：吴小虎 呼书杰 孙恩泽 张鑫[2] 赵琦 WU Xiao-hu;HU Shu-jie;SUN En-ze;ZHANG Xin;ZHAO Qi(Guangdong Urban&Rural Planning and Design Institute Co.,Ltd.,Guangzhou 510290,China;State Grid Tianjin Electric Power Company,Tianjin 300010,China;State Grid Tianjin Electric Power Research Institute,Tianjin 300384,China)

机构地区：[1]广东省城乡规划设计研究院有限责任公司,广东广州510290 [2]国网天津市电力公司,天津300010 [3]国网天津市电力公司电力科学研究院,天津300384

出　　处：《真空》2023年第6期42-46,共5页Vacuum

基　　金：中国博士后科学基金资助项目(2023M730823)。

摘　　要：大空间建筑既是城市景观的重要组成元素,又是展现城市特色、彰显时代风貌、传承城市历史的重要载体。氟化非晶碳薄膜有望作为外立面修饰材料,提升大空间建筑的自清洁、防雾和抗冰能力。本文介绍了氟化非晶碳薄膜的射频/直流共溅射方法,系统分析了薄膜微观形貌、粗糙度和化学组分随溅射功率比的变化规律,详细研究了化学组分和微观形貌对薄膜浸润性能的影响。结果表明:氟化非晶碳薄膜以岛状模式生长,当石墨/聚四氟乙烯溅射功率比从0升高至1.25时,含氟组分种类和含量的减少是薄膜亲水性增强的主要原因。Large-space building is an important component for the urban landscape.Moreover,it is an important carrier to show the characteristics of the city,highlight the style of the times,and inherit the history of the city.Fluorinated amorphous carbon(a-C:F)film is expected to be used as a facade modification material to improve the self-cleaning,anti-fog and anti-ice capability of large-space buildings.This paper introduces the radio frequency/direct current co-sputtering method of a-C:F film.The changes of microscopic morphology,surface roughness and chemical components with various sputtering power ratio are systematically analyzed.The effects of chemical composition and microscopic morphology on the wettability of a-C:F film are studied.The results show that a-C:F film grows in the island mode.When the graphite/polytetrafluoroethylene sputtering power ratio is increased from 0 to 1.25,the decreasing in the type and content of fluorine-containing components is the main reason for the enhancement of hydrophilicity of a-C:F film.

关 键 词：氟化非晶碳薄膜 城乡建设 疏水 微观形貌 

分 类 号：O484[理学—固体物理] TN147[理学—物理]