半导体器件测试虚拟仿真教学实验设计  

Design of Semiconductor Device Testing-Experiment Based on Virtual Simulation Technology

作　　者：钟英辉[1] 董馨源 马刘红 李梦珂 段智勇[1] ZHONG Yinghui;DONG Xinyuan;MA Liuhong;LI Mengke;DUAN Zhiyong(School of Physics and Microelectronics,Zhengzhou University,Zhengzhou 450001,China)

机构地区：[1]郑州大学物理学院(微电子学院),郑州450001

出　　处：《电气电子教学学报》2023年第6期208-210,共3页Journal of Electrical and Electronic Education

基　　金：河南省研究生教育改革与质量提升工程项目(YJS2022ZX07);郑州大学教育教学改革研究与实践项目(2022ZZUJG186,2022ZZUJG177);郑州大学虚拟仿真实验教学项目(2020ZZUXNXM005)。

摘　　要：半导体器件是集成电路的核心基础,器件特性是器件建模和集成电路设计的重要依据,半导体器件测试成为集成电路相关领域人才必须掌握的重要实践能力。针对实际测试实验存在设备和耗材昂贵、测试过程耗时长等问题,通过搭建半导体器件交直流特性测试系统的虚拟模型,并基于半导体器件科研测试数据反哺教学,学生通过对器件在不同偏置下不同特性的虚拟测试,巩固半导体器件理论知识,掌握测试设备操作技能,全面提升动手实践能力。Semiconductor devices are the core foundation of integrated-circuit(IC),and device characteristics are the important basis of device modeling and IC designing.Characteristics measurement of semiconductor devices is an important practical ability for talents in the IC field.There are many problems in actual test experiments,such as expensive equipment,expensive consumables and time-consuming testing process.This paper proposes to build a virtual model for the test system of semiconductor devices.Based on the real testing data of semiconductor devices,students carry out virtual testing of different characteristics under different biases,which can help students consolidate the theoretical knowledge of semiconductor devices,and master the operation skills of test equipment.Therefore,this virtual testing can comprehensively improve students′hands-on practice ability.

关 键 词：半导体器件 虚拟仿真 特性测试 

分 类 号：G642.8[文化科学—高等教育学]