日立S-3400N扫描电子显微镜常见故障排除及日常维护  

Troubleshooting and routine maintenance of Hitachi S-3400N scanning electron microscope

作　　者：史军娜 Shi Junna(Public Analysis and Testing Center of Beijing Forestry University,Beijing 100083,China)

机构地区：[1]北京林业大学公共分析测试中心,北京100083

出　　处：《分析仪器》2023年第6期93-94,共2页Analytical Instrumentation

基　　金：北京林业大学大型仪器创新基金资助项目(BJFU-DXYQCX-2022-02)。

摘　　要：扫描电子显微镜是进行微观形貌分析的大型精密仪器,广泛应用于我校的教学科研领域。为保证扫描电镜的高效运行、延长使用寿命,管理人员必须做好仪器的日常维护保养和常见故障排除工作。本文以S-3400N扫描电子显微镜为例,介绍该型号扫描电镜的常见故障及处理方法,阐述了日常维护保养的具体办法,以期对同类型仪器的管理人员提供参考和帮助。Scanning electron microscope(SEM)is a large precision instrument for the analysis of microscopic morphology.It is widely used in the teaching and research work of our school.In order to ensure the efficient operation of SEM and prolong its service life,the management personnel must do a good job in the daily maintenance and troubleshooting of the instrument.Taking S-3400N scanning electron microscope as an example,the common faults and treatment methods of this type of scanning electron microscope are introduced,and the specific methods of daily maintenance are expounded in order to provide reference and help for the managers of the same type of instruments.

关 键 词：扫描电镜 维护保养 故障排除 

分 类 号：TH742[机械工程—光学工程]