高后坐过载下硅基MEMS后坐保险装置响应特性  

Response Characteristics of Silicon-based MEMS Inertial InsuranceDevice under High Recoil Overload

作　　者：强甲 赵旭[1] 田中旺[1] 王晓霞[1] QIANG Jia;ZHAO Xu;TIAN Zhongwang;WANG Xiaoxia(Xi'an Institute of Electromechanical Information Technology,Xi'an 710065,China)

机构地区：[1]西安机电信息技术研究所,陕西西安710065

出　　处：《探测与控制学报》2023年第6期38-43,共6页Journal of Detection & Control

摘　　要：针对硅基相较于金属基材料延展性不足,在上万g发射环境下硅基MEMS后坐保险装置易发生失效的问题,对一种垂直基板式硅基MEMS后坐保险装置进行高后坐过载下响应特性研究。研究结果表明:高后坐过载下后坐保险装置的最大应力集中点位于靠近质量块的弹簧拐弯处,0.08 mm厚的弹簧在勤务跌落情况下最大应力值为1 188 MPa;闭锁机构的直角卡钩易发生闭锁后反弹脱钩;当弹簧厚度不超出0.2 mm时,增加弹簧厚度可以有效缓解跌落环境下弹簧的应力集中,最大应力值降低40.76%;当弹簧厚度达到0.24 mm后,应力集中加剧,达到0.28 mm后正常发射环境下质量块无法达到闭锁位移。为硅基MEMS后坐保险装置改进提供支撑。Aiming at the problem that the silicon-based MEMS setback arming device is prone to failure in the launch environment of tens of thousands of G due to the lack of elasticity of silicon-based materials compared with metal-based materials,the response characteristics of a vertical substrate silicon-based MEMS setback arming device under high recoil overload were studied by combining theory,simulation and experiment.The results show that the maximum stress concentration point of the setback arming device under high recoil overload is located at the spring corner near the mass block.The maximum stress of 0.08 mm thick spring is 1188 MPa under the condition of drop environment.When the spring thickness does not exceed the 0.2 mm,increasing the spring thickness can effectively alleviate the stress concentration of the spring in the drop environment,the maximum stress value was reduced by 40.76%.When the spring thickness reaches the 0.24 mm,the stress concentration intensifies and reaches after 0.28 mm,the mass block cannot reach the locking displacement in the normal launch environment,which provides support for the further improvement of the silicon-based MEMS setback arming device.

关 键 词：微机电系统 硅基安全系统 后坐保险装置 

分 类 号：TJ43[兵器科学与技术—火炮、自动武器与弹药工程]