五维自动调整差动共焦间隙测量方法  

Differential confocal axial space measurement method based on five-dimensional auto-adjustment

作　　者：崔明拓 邱丽荣[1] 崔健 杨帅 CUI Mingtuo;QIU Lirong;CUI Jian;YANG Shuai(MIIT Key Laboratory of Complex-field Intelligent Exploration,School of Optics and Photonics,Beijing Jnstitute of Technology,Beijing 10008l,China)

机构地区：[1]北京理工大学光电学院“复杂环境智能感测技术”工信部重点实验室,北京100081

出　　处：《光学技术》2023年第6期692-698,共7页Optical Technique

基　　金：山东省重点研发计划项目(2021CXGC010201)。

摘　　要：为精确、快速测量镜组内各透镜间的轴向间隙,提出一种基于五维自动调整的差动共焦间隙测量方法。该方法根据CCD探测器实时获取的光斑信号检测被测镜组光轴的平移偏差与倾斜偏差,依据偏差信息、通过五维自动调整技术实现镜组高精度调整,再利用差动共焦高精度层析定焦和镜组内部光线追迹实现轴向间隙高精度测量。分析和实验表明,本方法可以有效提高姿态调整效率3.4倍,透镜间隙重复测量精度可达到0.53μm。该方法为实现镜组间隙的快速高精度测量提供了有效途径,同时还为透镜的中心厚度、焦距、半径等多种参数快速高精度测量提供了有效方法。In order to accurately and quickly measure the axial gap between each lens in the mirror group,a differential confocal gap measurement method based on five-dimensional automatic adjustment is proposed.This method detects the translation deviation and tilt deviation of the optical axis of the lens group under test according to the spot signal obtained in real time by the CCD detector,realizes the high-precision adjustment of the mirror group according to the deviation information,and realizes the high-precision measurement of the axial gap by using the differential confocal high-precision tomography fixed focus and the internal light tracing of the mirror group.Analysis and experimental results show that the method can effectively improve the attitude adjustment efficiency by 3.4 times,and the accuracy of lens gap repeat measurement can reach O.53μm.This method provides an effective way to achieve fast and high-precision measurement of lens group gap,and also provides an effective method for rapid and high-precision measurement of various parameters such as center thickness,focal length,and radius of the lens.

关 键 词：五维自动调整 镜组轴向间隙 差动共焦 高精度 

分 类 号：TH741[机械工程—光学工程] TP216.1[机械工程—仪器科学与技术]