半球谐振子超精密修调方法研究  

Method of Ultra-precision Modification and Levelling of Hemispherical Harmonic Resonators

作　　者：刘俊峰[1,2] 王瑜 杜春阳 赵羽乾 戴一帆 赖涛[1,2] LIU Junfeng;WANG Yu;DU Chunyang;ZHAO Yuqian;DAI Yifan;LAI Tao(Laboratory of Science and Technology on Integrated Logistics Support,College of Intelligence Science and Technology,National University of Defense Technology,Changsha 410073,China;Hunan Key Laboratory of Ultra-Precision Machining Technology,Changsha 410073,China)

机构地区：[1]国防科技大学智能科学学院装备综合保障技术重点实验室,长沙410073 [2]超精密加工技术湖南省重点实验室,长沙410073

出　　处：《精密成形工程》2024年第1期158-166,共9页Journal of Netshape Forming Engineering

基　　金：国家自然科学基金(52375473,51991372);国防科技重点实验室基金(KT0406052303)。

摘　　要：目的研究因谐振子质量缺陷而引起的频率裂解机制,进而对刚性轴位置进行质量高分辨率可控去除,提高陀螺精度。方法首先基于多区域配合划分法建立半球谐振子高精度有限元仿真模型,分析质量大小与位置对谐振子频差的影响规律。其次搭建谐振子振动特性检测平台,利用拍频法实现其频差值和刚性轴位置的精确辨识。最后结合仿真与辨识结果以及离子束加工方法确定谐振子超精密修调方案。结果优化网格划分方法后,谐振子有限元模型频差值小于0.0001Hz,当修调定位误差相同时,在一个范围内的质量去除比单点质量去除的修调效率更高;谐振子质量缺陷四次谐波刚性轴位置辨识精度可达0.1°,与常见的幅值法相比,其精度提高了一个数量级;通过三次点线结合方式进行质量修调后,谐振子频差值小于0.001Hz,修调效率与精度得到了提升。结论提出的谐振子仿真模型、振动特性测试方法以及离子束修调工艺精度较高且可行性较强,对实现半球谐振子性能高精度检测以及高质量加工具有重要意义。The work aims to study the frequency splitting mechanism caused by quality defects of the resonator and conduct high-resolution controllable quality removal on rigid axis position to improve the accuracy of hemispherical resonant gyroscope(HRG).Firstly,a high-precision finite element simulation model of a hemispherical harmonic resonator was established based on the method of multi region coordination division,and the effect of mass size and position on the frequency difference of the harmonic resonator was analyzed.Secondly,a platform for measuring the vibration characteristics of the harmonic resonator was establish,and the frequency difference value and the position of rigid axis were accurately identified based on the beat frequency method. Finally, the ultra-precision modification and levelling scheme of the harmonic resonator was determined by combining simulation and identification results with ion beam processing methods. After optimizing the grid division method, the fre-quency difference value of the finite element model of the harmonic resonator was less than 0.000 1 Hz. Compared with single point removal, when the positioning error was the same, the modification efficiency of quality removal within a range was higher than that of single point quality removal. The identification accuracy of the fourth harmonic rigid axis position of the quality defect of the harmonic resonator was able to reach 0.1°, which was an order of magnitude higher than the common am-plitude method. The frequency difference value of the harmonic resonator after three rounds of modification and levelling through the combination of dots and lines was less than 0.001 Hz, which improved the efficiency and accuracy of modification and levelling. The proposed harmonic resonator simulation model, vibration characteristic testing method, and ion beam tuning process have high accuracy and strong feasibility, which is of great significance for achieving high-precision detection and high-performance processing of hemispherical harmonic re

关 键 词：半球谐振子 频差 超精密修调 刚性轴位置 离子束加工 

分 类 号：TH162[机械工程—机械制造及自动化]