高性能可穿戴式柔性压力传感器的制作与检测  

Fabrication and Detection of High Performance Wearable Flexible Pressure Sensor

作　　者：窦颖艳[1] 姚俊[2] DOU Yingyan;YAO Jun(School of Electronics and Information,Nanchang Institute of Technology,Nanchang Jiangxi 330044,China;Special Robot Technology Research Institute,School of Computer Information and Engineering,Nanchang Institute of Technology,Nanchang Jiangxi 330044,China)

机构地区：[1]南昌理工学院电子与信息学院,江西南昌330044 [2]南昌理工学院特种机器人技术研究所,计算机信息工程学院,江西南昌330044

出　　处：《电子器件》2023年第6期1680-1684,共5页Chinese Journal of Electron Devices

基　　金：2022年度江西省教育厅科学技术项目(GJJ2022715)。

摘　　要：对柔性压力传感器进行了设计和研究,总体采用三明治式结构,介质层选择了复眼微结构的设计方式,电极层则需要在改性后的PDMS表面溅射一层金属银。将制备的三层结构通过键合的方式组成响应速度和灵敏度均较高的传感器。该传感器的测试结果为:当传感器表面压力一定时,复眼结构的电容式压力传感器的灵敏度达到了0.32 kPa^(-1),响应时间和恢复时间分别为130 ms和120 ms,迟滞性参数均小于7%,经过12 000次的撞击实验,传感器仍然能保持稳定的输出。制备的传感器具有较强的响应特性、良好的恢复性和稳定性,能够适应柔性可穿戴电子器件的应用需求。The flexible pressure sensor is designed and studied.Generally,the sandwich structure is adopted.The design method of compound eye microstructure is adopted for the dielectric layer,and a layer of metal silver needs to be sputtered on the surface of the modi-fied PDMS for the electrode layer.The prepared three-layer structure is bonded to form a sensor with high response speed and sensitivity.The test results of the sensor are as follows:when the surface pressure of the sensor is constant,the sensitivity of the capacitive pres-sure sensor with compound eye structure reaches 0.32 kPa^(-1),the response time and recovery time are 130 ms and 120 ms respectively,and the hysteresis parameters are less than 7%.After 12000 impact experiments,the sensor can still maintain a stable output.The pre-pared sensor has strong response characteristics,good recovery and stability,and can meet the application requirements of flexible wear-able electronic devices.

关 键 词：电容式传感器 压力传感器 复眼结构 重复性测试 动态检测 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]