红外光学材料单晶锗固结磨料研磨加工特性研究  

Research on the abrasive processing characteristics of single crystal germanium infrared optical material fixed abrasives

作　　者：郝益群 杨晓京[1] 袁锐波[1] 姚同 HAO Yiqun;YANG Xiaojing;YUAN Ruibo;YAO Tong(School of Mechanical and Electrical Engineering,Kunming University of Science and Technology,Kunming 650500,China)

机构地区：[1]昆明理工大学机电工程学院,昆明650500

出　　处：《重庆理工大学学报（自然科学）》2023年第12期179-186,共8页Journal of Chongqing University of Technology：Natural Science

基　　金：国家自然科学基金项目(51765027)。

摘　　要：为实现单晶锗高质高效研磨加工,采用固结磨料研磨加工方式,以单晶锗的表面粗糙度和材料去除率为评价指标,通过单因素实验和正交实验,研究研磨垫磨粒大小和研磨参数(研磨盘转速、研磨压力、研磨时间)对固结磨料研磨加工特性的影响规律。结果表明:采用磨粒粒度为W 8-12的金刚石研磨垫可以同时兼顾单晶锗的表面质量和加工效率;研磨参数对单晶锗表面粗糙度的影响相对较小,影响单晶锗材料去除率的显著因素顺序为研磨盘转速>研磨时间>研磨压力;以材料去除率为目标的最佳研磨参数为:研磨盘转速80 r/min,研磨压力9 kPa,研磨时间4 min;通过响应曲面分析得到研磨盘转速和研磨压力的交互作用对材料去除率的影响较大。研究结果可为单晶锗研磨加工中工艺参数的选择提供指导。Single crystal germanium(Ge)is the key material for manufacturing infrared lens and windows,which are widely used in laser detection and satellite remote sensing.To achieve high-quality and highly efficient lapping of Ge,the fixed abrasive lapping method is employed,and the surface roughness and material removal rate of Ge are taken as evaluation indexes.Through single factor experiment and orthogonal experiment,the influence of abrasive particle size of lapping pad and parameters(speed of lapping disc,lapping pressure and time)on the characteristics of fixed abrasive grinding is studied.The results show both the surface quality and machining efficiency of Ge can be improved by using diamond lapping pad with abrasive particle size of W8-12.The effect of lapping parameters on the surface roughness of Ge is relatively small,the order of significant factors affecting the removal rate of Ge is speed>lapping time>lapping pressure.The best lapping parameters for the material removal rate include a lapping disc speed of 80 r/min,a lapping pressure of 9 kPa,and lapping time of 4 minutes.Response surface analysis shows the interaction between the rotating speed of the lapping disc and the lapping pressure exerts a great influence on the material removal rate.The study provides guidance for the selection of process parameters in grinding single crystal germanium.

关 键 词：单晶锗 固结磨料 研磨加工 材料去除率 

分 类 号：TG506[金属学及工艺—金属切削加工及机床]