IGZO薄膜晶体管生物传感器无标记检测强直性脊柱炎  

Label-Free Detection of Ankylosing Spondylitis by IGZO Thin-Film Transistor Biosensor

作　　者：吕腾博 刘嘉乐 刘丽 李昕[1] 韩传余 王小力[1,2] LU Tengbo;LIU Jiale;LIU Li;LI Xin;HAN Chuanyu;WANG Xiaoli(School of Microelectronics,Xi’an Jiaotong University,Xi’an 710049,China;School of Science,Xi’an Jiaotong University,Xi’an 710049,China;Normal College,Shenyang University,Shenyang 110044,China)

机构地区：[1]西安交通大学微电子学院,西安710049 [2]西安交通大学物理学院,西安710049 [3]沈阳大学师范学院,沈阳110003

出　　处：《西安交通大学学报》2024年第2期157-163,共7页Journal of Xi'an Jiaotong University

基　　金：国家自然科学基金资助项目(62174130);装备预研基金资助项目(2022-JCJQ-JJ-1099);陕西省重点研发计划资助项目(2023-YBSF-407)。

摘　　要：为了快速检测强直性脊柱炎血清学分子标志物人体白细胞抗原(HLA-B27),开发了一种基于人体白细胞抗原B27(HLA-B27)功能化的氧化铟镓锌(IGZO)薄膜晶体管生物传感器。利用射频磁控溅射技术和微纳加工工艺制备了IGZO薄膜晶体管(IGZO TFT),采用3-氨丙基三乙氧基硅烷(APTES)和抗体对IGZO TFT进行修饰,制备出针对HLA-B27检测的生物传感器。实验结果表明,功能化的IGZO TFT生物传感器具有稳定的电学特性和传感性能。传感器对HLA-B27的检测极限为1 pg/mL,在1 pg/mL至100 ng/mL的范围内均有良好的线性响应。这说明所设计的高性能生物传感器能够有效检测出强直性脊柱炎的标志物。此外,IGZO TFT可以扩展为传感器阵列平台,实现对某种疾病多种标志物的联合检测,在便携式床旁诊断设备的应用中具有巨大潜力。In this paper,the IGZO thin-film transistor biosensor based on functionalized human leukocyte antigen B27(HLA-B27)is developed for rapid detection of the HLA-B27,a serological molecular marker for ankylosing spondylitis.The fabrication of IGZO thin-film transistors(IGZO TFT)using radio-frequency magnetron sputtering technology and micro-nano-processing is described.The IGZO TFT is modified with 3-aminopropyltriethoxysilane(APTES)and antibodies to prepare biosensors for HLA-B27 detection.The experimental results show that the functionalized IGZO TFT biosensor has stable electrical characteristics and sensing performance.The sensor shows a detection limit of 1 pg/mL for HLA-B27,and its linear response within the concentration range of 1 pg/mL to 100 ng/mL is good.These results indicate that the proposed high-performance biosensor can effectively detect biomarker of ankylosing spondylitis.In addition,the IGZO TFT can be expanded into a sensor array platform to realize combined detection of multiple markers for a certain disease,which has great potential in the application of portable bedside diagnostic devices.

关 键 词：IGZO 薄膜晶体管 生物传感器 强直性脊柱炎 人体白细胞抗原B27 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置]