基于弹光调制的椭偏测量驱动电路系统设计  

Design of ellipsometry drive circuit system based on photoelastic modulation

作　　者：易进 张瑞 薛鹏[1,2,3] 卜韩 王志斌[1,2,3] 李孟委 YI Jin;ZHANG Rui;XUE Peng;BU Han;WANG Zhibin;LI Mengwei(Institute of Instrument and Electronics,North University of China,Taiyuan 030051,China;Shanxi Optoelectronic Information and Instrument Engineering Technology Research Center,Taiyuan 030051,China;Frontier Interdisciplinary Research Institute,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,山西太原030051 [2]山西省光电信息与仪器工程技术研究中心,山西太原030051 [3]中北大学前沿交叉科学研究院,山西太原030051

出　　处：《电子设计工程》2024年第4期32-36,42,共6页Electronic Design Engineering

基　　金：国家自然科学基金(62105302);山西省青年科学基金(20210302124269)。

摘　　要：随着椭偏测量技术的发展,对椭偏测量速度、测量范围有了更高的要求。针对传统的双旋转补偿器测量方法受限于机械限制,调制频率低的问题。采用弹光调制技术,利用调制器的快轴旋转取代传统的旋转补偿器,设计了一种基于LC谐振放大的双驱动电路,利用现场可编程门阵列(FPGA)实现对弹光调制器(PEM)的高速驱动控制。根据弹光调制驱动控制要求对电路设计思路和方法进行了详细分析。通过仿真和实验结果表明,所设计的电路系统输出频率能稳定控制在60 kHz,幅值能达到430 VPP以上,满足PEM快轴高速稳定驱动的需求。With the development of ellipsometry technology,there are higher requirements for ellipsometry measurement speed and measurement range.Aiming at the problem that the traditional double-rotation compensator measurement method is limited by mechanical limitations and the modulation frequency is low.Using photoelastic modulation technology,the traditional rotation compensator is replaced by the fast axis rotation of the modulator,a dual driving circuit based on LC resonance amplification is designed,and the high-speed driving control of the Photoelastic Modulator(PEM) is realized by using a Field Programmable Gate Array(FPGA).According to the requirements of photoelastic modulation drive control,the ideas and methods of circuit design are analyzed in detail.The simulation and experimental results show that the output frequency of the designed circuit system can be stably controlled at 60 kHz,and the amplitude can reach more than 430 VPP,which meets the requirements of high-speed and stable driving of the PEM fast axis.

关 键 词：椭偏测量 弹光快轴调制 FPGA 谐振驱动 

分 类 号：TN751.2[电子电信—电路与系统]