精细金属掩模板用近零夹杂Invar合金制备技术  

Preparation technology of Invar alloy with near-zero inclusion for fine metal mask

作　　者：任为 余瑜 张帅[1] 郭占成[1] REN Wei;YU Yu;ZHANG Shuai;GUO Zhancheng(State Key Laboratory of Advanced Metallurgy,University of Science and Technology Beijing,Beijing 100083,China)

机构地区：[1]北京科技大学绿色低碳钢铁冶金全国重点实验室,北京100083

出　　处：《矿冶》2024年第1期70-78,95,共10页Mining And Metallurgy

基　　金：国家自然科学基金资助项目(52174275)。

摘　　要：Invar合金是制备精细金属掩模板(Fine Metal Mask,简称FMM)的重要基材,其纯净度直接影响FMM的质量以及有机发光二极管(Organic Light EmittingDiode,简称OLED)技术的发展水平。首先概述了FMM的主要制备技术,介绍了对FMM基材Invar合金的质量要求,并对国产Invar合金箔和国外进口Invar合金箔内的夹杂物进行了表征分析。结果表明,国产Invar合金箔的纯净度与进口Invar合金箔相比,仍存在很大的差距,主要体现在夹杂物的尺寸和数量等方面。为实现OLED配套产业全国产化,攻克Invar合金的近零夹杂难题,开发新型制备技术是关键突破点。最后详细论述了超重力技术在Invar合金除杂方面的研究成果和电铸Invar合金箔应用的可行性,并指出超重力技术和电铸技术有望解决近零夹杂金属材料的制备难题。Invar alloy is an important substrate in the production of fine metal mask(FMM),and its purity directly impacts the quality of FMM and the development level of OLED technology.This paper first outlines the main preparation technologies of FMM,introduces the quality requirements of Invar alloy as the substrate of FMM,and characterizes and analyzes inclusions in domestically produced Invar alloy foll as well as imported counterparts.The results indicate that there is still a certain gap between the purity of domestically produced Invar alloy foll and imported counterparts,which is mainly reflected in the size and quantity of inclusions.To achieve the full localization of the OLED supporting industry and overcome the problem of Invar alloy with near-zero inclusion,the development of new preparation technology is a key breakthrough point.Finally,the research achievements in using the super-gravity technology to remove impurities in Invar alloy and the feasibility of applying electroforming to Invar alloy foll are discussed in detail,and it is pointed out that super-gravity and electroforming technologies are expected to solve the preparation problem of metal materials with near-zero inclusion.

关 键 词：精细金属掩模板(FMM) Invar合金 电铸成型 超重力 夹杂物脱除 

分 类 号：TG142[一般工业技术—材料科学与工程]