超纯液相环境纳米金属催化降除多元微污染物特性与机理  

Characteristics and mechanism of catalytic degradation of multiple micropollutants by nano-metals in ultra-pure water

作　　者：郑伟 ZHENG Wei(China Electronics Engineering Design Institute Co.,Ltd.,Beijing 100142,China)

机构地区：[1]中国电子工程设计院股份有限公司,北京100142

出　　处：《给水排水》2024年第1期66-77,共12页Water & Wastewater Engineering

摘　　要：集成电路超纯水制备系统的精处理工艺段提供了微污染控制的保障环境。在痕量污染控制环境下,以铂族金属为代表,构建金属纳米粒子对氢氧合成反应的复相催化体系,可以实现多元微污染物的联合降除,进而满足3nm制程超纯水制备系统溶解气体和痕量氧化剂的控制要求。研究阐述和总结了氢氧合成反应的四种反应机制和催化作用机理,重点讨论了金属表面结构、活性位点、形貌尺寸、合金组分、载体性质、液相反应环境对各反应途径催化活性及选择性的密切影响,形成了洁净水相氢气氧化反应的边界条件,对于金属纳米粒子在超纯水领域的应用研究具有导向意义。The polishing process section of the integrated circuit ultra-pure water preparation system provides a guaranteed environment for micro-pollution control.In the trace pollution control environment,a multiphase catalytic system of metal nanoparticles for hydrogen-oxygen synthesis reaction,represented by palladium group,can realize the combined reduction and removal of multiple micro-pollutants,and then meet the control requirements of dissolved gas and trace oxidizer in the 3nm process ultra-pure water preparation system.In this paper,four reaction mechanisms and catalytic mechanisms of hydrogen and oxygen synthesis reactions were systematically described and summarized,the close influence of metal surface structure,active site,morphology and size,carrier properties,liquid phase reaction environment and alloy components on catalytic characteristics(activity and selectivity)of each reaction path was emphatically discussed,and formed the boundary conditions of hydrogen oxidation reaction in clean water phase.It has guiding signifi-cance for the application research of metal nanoparticles in the field of ultra-pure water.

关 键 词：超纯水 微污染控制 金属纳米粒子 催化反应活性 选择性 

分 类 号：X703[环境科学与工程—环境工程]